2013
DOI: 10.7567/jjap.52.08je14
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Nature of V-Shaped Defects in GaN

Abstract: GaN films with thicknesses up to 3 mm were grown in two custom-made halide vapor phase epitaxy (HVPE) reactors. V-shaped defects (pits) with densities from 1 cm −2 to 100 cm −2 were found on the surfaces of the films. Origins of pit formation and the process of pit overgrowth were studied by analyzing the kinematics of pit evolution. Two mechanisms of pit overgrowth were observed. Pits can be overgrown intentionally by varying growth parameters to increase the growth rate of pit facets. Pits can overgrow spont… Show more

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Cited by 30 publications
(17 citation statements)
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“…GaN crystals 200-400 μm thick grown by the two stage hydride vaporphase epitaxy (HVPE) method at growth temperatures between 1000 and 1150°C on sapphire [16] were studied. The grown in dislocation density was ~10 6 cm -2 .…”
Section: Methodsmentioning
confidence: 99%
“…GaN crystals 200-400 μm thick grown by the two stage hydride vaporphase epitaxy (HVPE) method at growth temperatures between 1000 and 1150°C on sapphire [16] were studied. The grown in dislocation density was ~10 6 cm -2 .…”
Section: Methodsmentioning
confidence: 99%
“…Taking into account the results of morphology investigation presented in this work and the literature, 13,15,37,38 a model for the growth of bulk HVPE-grown GaN is proposed: The growth process of bulk GaN using HVPE techniques is governed by the formation and subsequent overgrowth of the so-called V-type defects or pits on the film surface. The origin of pit formation could be any type of imperfection able to locally reduce the growth rate such as threading dislocations, cracks, substrate contamination, foreign particles landing on the growing film, etc.…”
Section: Ecs Journal Of Solid State Science and Technology 5 (5) P21mentioning
confidence: 99%
“…Диоды Шоттки изготавливались на основе слоев GaN n-типа проводимости, выращенных на сапфировых под-ложках с ориентацией ростовой поверхности (0001) ме-тодом газофазной хлорид-гидридной эпитаксии (HVPE) (диоды A и B) [13] Измерения статических вольт-амперных характери-стик диодов проведены с помощью Keithley 238, ем-костные измерения проведены на частоте 1 МГц с по-мощью CV анализатора Keithley 590. Измерения фото-люминесценции эпитаксиальных слоев n-GaN, а также объемных кристаллов GaN толщиной d = 200 мкм [13], выращенных методом HVPE, проводились при ком-натной температуре с помощью спектрометра Avantes.…”
Section: экспериментunclassified
“…Измерения фото-люминесценции эпитаксиальных слоев n-GaN, а также объемных кристаллов GaN толщиной d = 200 мкм [13], выращенных методом HVPE, проводились при ком-натной температуре с помощью спектрометра Avantes. Фотолюминесценция возбуждалась He−Cd-лазером на длине волны λ = 325 нм со стороны поверхности роста и детектировалась " на просвет" со стороны подложки.…”
Section: экспериментunclassified