Near-Contact Gas Damping and Dynamic Response of High-g MEMS Accelerometer Beams

Parkos, Devon; Raghunathan, Nithin; Venkattraman, Ayyaswamy; Sanborn, Brett; Chen, Weinong; Peroulis, Dimitrios; Alexeenko, Alina

doi:10.1109/jmems.2013.2269692

Cited by 9 publications

(4 citation statements)

References 17 publications

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“…Parkos et al [18] developed a model for the gas-induced damping of a microbeam for a broad range of gap size between the beam and the gate. Their gas-damping model is based on the Boltzmann Ellipsoidal Statistical Bhatnagar-Gross-Krook (ES-BGK) simulation [19], [20] and extended from the Gallis-Torczynski damping model [21].…”

Section: Squeeze-film Dampingmentioning

confidence: 99%

Significance of Adhesion-Reduced Bouncing in Dynamic Contacts of Ohmic RF MEMS Switches

Yang

Peroulis

2015

J. Microelectromech. Syst.

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This paper presents a mathematical Euler-Bernoulli beam-based model that simulates the dynamic behavior of typical cantilever-type radio frequency microelectromechanical systems (RF MEMS) switches, including nonlinearly adhesive contact theory and cycle-dependent bouncing patterns. In particular, the adhesion-induced energy dissipation per cycle is modeled as an effective damping parameter and included in the dynamic model of the device. This new modeling approach eliminates the time-consuming calculation related to the complexity of the tip-drain switch contact. This model also accurately captures previously reported switch bouncing patterns and their time evolution. Comparing the modeling and experimental data enables us to estimate the time-dependent adhesion force throughout the switch lifetime. Furthermore, a nondimensionalized model is presented to analyze the characteristics of a general RF MEMS switch without a priori knowledge of its dimensions.[2014-0266] Index Terms-Microelectromechanical systems (MEMS) switch, contact bounces, adhesion.1057-7157

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Section: Squeeze-film Dampingmentioning

confidence: 99%

Significance of Adhesion-Reduced Bouncing in Dynamic Contacts of Ohmic RF MEMS Switches

Yang

Peroulis

2015

J. Microelectromech. Syst.

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“…It can be found that the nonlinear damping is only generated at a low-frequency high-velocity oscillation, so the influence of oscillation frequency must be introduced to construct the damping model. Consequently, the advantage of the coupled framework is to study the large linear displacement problems of a micro-structure, such as shock problem of a high-g MEMS accelerometer [56]. And for the high-frequency small-displacement oscillation, the decoupled method still exhibits a good performance to predict the damping force or torque.…”

Section: Discussionmentioning

confidence: 99%

Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical-systems

Wang¹,

Li²,

Zhuo³

et al. 2022

Preprint

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In this paper, the nonlinear squeeze-film damping (SFD) involving rarefied gas effect in the micro-electro-mechanical-systems (MEMS) is investigated. Considering the motion of structures (beam, cantilever, and membrane) in MEMS, the dynamic response of structure will be influenced largely by the squeeze-film damping. In the traditional model, a viscous damping assumption that damping force is linear with moving velocity is used. As the nonlinear damping phenomenon is observed for a micro-structure oscillating with a high-velocity, this assumption is invalid and will generates error result for predicting the response of micro-structure. In addition, due to the small size of device and the low pressure of encapsulation, the gas in MEMS usually is rarefied gas. Therefore, to correctly predict the damping force, the rarefied gas effect must be considered. To study the nonlinear SFD phenomenon involving the rarefied gas effect, a kinetic method, namely discrete unified gas kinetic scheme (DUGKS), is adopted. And based on DUGKS, two solving methods, a traditional decoupled method (Eulerian scheme) and a coupled framework (arbitrary Lagrangian-Eulerian scheme), are adoped. With these two methods, two basic motion forms, linear (perpendicular) and tilting motions of a rigid micro-beam, are studied with forced and free oscillations.

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“…Gallis and Torczynski [22] developed a molecular-dynamics-based model using the direct simulation Monte Carlo method for squeeze-film damping on a rigid beam. Parkos et al [24] further improved Gallis and Torczynski's model and validated it experimentally. In Parkos' model, the variable damping coefficient C f is defined as…”

Section: Damping Forcementioning

confidence: 99%

“…Sumali [23] experimentally validated some existing models, including the Gallis and Torczynski models, of squeeze-film damping in the free molecular regime for a wide range of Knudsen numbers. Further improvements to the Gallis and Torczynski models were made by Parkos et al and led to a near-contact gas damping model [24]. This model has also been validated experimentally and shown to be applicable for nano switches because the parameters are comparable.…”

Section: Introductionmentioning

confidence: 98%

Bouncing dynamics of electrostatically actuated NEM switches

Bognash¹,

Asokanthan²

2022

Nano Ex.

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The aim of the present research is to understand the bouncing dynamic behavior of nano electromechanical (NEM) switches in order to improve the switch performance and reliability. It is well known that bouncing can dramatically degrade the switch performance and life; hence, in the present study, the bouncing dynamics of a cantilever-based NEM switch has been studied in detail. To this end, the repulsive van der Waals force is incorporated into a nano-switch model to capture the contact dynamics. Intermolecular forces, surface effects, and gas rarefication effects were also included in the proposed model. The Euler-Bernoulli beam theory and an approximate approach based on Galerkin’s method have been employed to predict transient dynamic responses. In the present study, performance parameters such as initial contact time, permanent contact time, major bounce height, and the number of bounces, were quantified in the presence of interactive system nonlinearities. The performance parameters were used to investigate the influence of surface effects and rarefication effects on the performance of an electrostatically actuated switch. Recommended operating conditions are suggested to avoid excessive bouncing for these types of NEM switches.

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Near-Contact Gas Damping and Dynamic Response of High-g MEMS Accelerometer Beams

Cited by 9 publications

References 17 publications

Significance of Adhesion-Reduced Bouncing in Dynamic Contacts of Ohmic RF MEMS Switches

Significance of Adhesion-Reduced Bouncing in Dynamic Contacts of Ohmic RF MEMS Switches

Investigation of nonlinear squeeze-film damping involving rarefied gas effect in micro-electro-mechanical-systems

Bouncing dynamics of electrostatically actuated NEM switches

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