We develop a perturbation theory of quantum (and classical) master equations with slowly varying parameters, applicable to systems which are externally controlled on a time scale much longer than their characteristic relaxation time. We apply this technique to the analysis of finite-time isothermal processes in which, differently from quasi-static transformations, the state of the system is not able to continuously relax to the equilibrium ensemble. Our approach allows to formally evaluate perturbations up to arbitrary order to the work and heat exchange associated to an arbitrary process. Within first order in the perturbation expansion, we identify a general formula for the efficiency at maximum power of a finite-time Carnot engine. We also clarify under which assumptions and in which limit one can recover previous phenomenological results as, for example, the Curzon-Ahlborn efficiency.A central result in the study of open quantum systems [1, 2] is the Markovian Master Equation (MME) approach which, under realistic assumptions, describes the temporal evolution of a system of interest A induced by a weak coupling with a large external environment E. This consists in a first order linear differential equatioṅ ρ(t) = L[ρ(t)] where ρ(t) is the density matrix of A and where the generator of the dynamics is provided by a quantum Liouvillian superoperator L that can be casted in the so called Gorini-Kossakowski-Sudarshan-Lindblad form [3][4][5]. For autonomous systems the latter does not exhibit an explicit time dependence and the dynamics of A exponentially relaxes to a (typically unique) equilibrium steady state ρ 0 identified by the null eigenvector equation L[ρ 0 ] = 0. MMEs can also be employed to describe the temporal evolution of A when it is tampered by the presence of slow varying, external driving forces. Indeed, as long as these operate on a time scale which is much larger than the characteristic bath correlations times and the inverse frequencies of the system of interest, the effective coupling between A and E adapts instantaneously to the driving control, resulting on a MME governed by a time-dependent Liouvillian generator, i.e.An explicit integration of this equation is in general difficult to obtain. Yet, if the control forces are so slow that their associated time scale is also larger with respect to the relaxation time of the system induced by the interaction with E, one expects ρ(t) to approximately follow the instantaneous equilibrium state ρ 0 (t) that nullifies L t . Our aim is to estimate quantitative deviations from this ultra-slow driving regime. For this purpose we develop a perturbation theory valid in the limit of slowly varying Liouvillians L t and derive a formal solution of Eq. (1) which allows one to evaluate non-equilibrium corrections up to arbitrary order. The main motivation of our analysis is to model thermodynamic processes and cycles beyond the usual reversible limit which is strictly valid only for infinitely long quasi-static transformations. Finite-time thermodynamics [7,8]...