1993
DOI: 10.1063/1.108933
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Near-field optical microscope using a silicon-nitride probe

Abstract: Operation of an alternative near-field optical microscope is presented. The microscope uses a microfabricated silicon-nitride probe with integrated cantilever, as originally developed for force microscopy. The cantilever allows routine close contact near-field imaging on arbitrary surfaces without tip destruction. The effect of adhesion forces on the coupling to the evanescent wave has been observed. Images with a lateral resolution of about 50 nm are presented and compared with atomic force images. A specific… Show more

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Cited by 109 publications
(41 citation statements)
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“…Van Hulst et al overcame some of these disadvantages, introducing a combined scanning force microscope (SFM) and photon scanning tunneling microscope (PSTM). Commercially available silicon nitride cantilevers with pyramidal tips were employed as optical near-field probes in both transmission and reflection mode [5,6]. On the basis of this concept other approaches were recently presented where SFM cantilevers were modified in a single manufacturing process [7][8][9][10].…”
mentioning
confidence: 99%
“…Van Hulst et al overcame some of these disadvantages, introducing a combined scanning force microscope (SFM) and photon scanning tunneling microscope (PSTM). Commercially available silicon nitride cantilevers with pyramidal tips were employed as optical near-field probes in both transmission and reflection mode [5,6]. On the basis of this concept other approaches were recently presented where SFM cantilevers were modified in a single manufacturing process [7][8][9][10].…”
mentioning
confidence: 99%
“…Based on the distance control system of Z axis that maintains the distance between the probe and the sample, the SNOM modes are mainly classified into STM [173], transient light intensity [174], shear force [175], and AFM [176][177][178][179]. The AFM mode SNOM uses an AFM cantilever as an optical probe.…”
Section: Nano-diagnosis and Nano-sensing System Using Snoammentioning
confidence: 99%
“…1. The combination atomic force microscopy (AFM) and NSOM tip is a hollow aluminum pyramid integrated on a Si cantilever that converts the evanescent field to a propagating wave by locally frustrated total internal reflection [6]. A photomultiplier tube is aligned to a subwavelength diameter pinhole centered in the tip to detect the wave emanating from the tip that is proportional to the evanescent field.…”
Section: Experimental Apparatusmentioning
confidence: 99%