Near-field Thermal Nanolithography Using Silk Proteins

Lee, W.; Zhang, S.; Liu, M.; Tao, Tiger H.

doi:10.1364/cleo_at.2016.jw2a.106

Cited by 2 publications

(2 citation statements)

References 2 publications

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“…Biomaterial Silk fibroin (bombyx mori) is an exciting green resist material used in various lithographic techniques including electron beam lithography (EBL), photolithography, contact printing, and inkjet printing [17][18][19][20][21][22][23][24][25]. Silk-based lithographic techniques are demonstrated to be bio-friendly as they use biomaterial silk as the resist and water as the developer [20,26].…”

Section: Introductionmentioning

confidence: 99%

Silk as a biodegradable resist for field-emission scanning probe lithography

Bicer¹,

Kumar²,

Melikov³

et al. 2020

Nanotechnology

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The patterning of silk allows for manufacturing various structures with advanced functionalities for optical and tissue engineering and drug delivery applications. Here, we propose a high-resolution nanoscale patterning method based on field-emission scanning probe lithography (FE-SPL) that crosslinks the biomaterial silk on conductive indium tin oxide (ITO) promoting the use of a biodegradable material as resist and water as a developer. During the lithographic process, Fowler-Nordheim electron emission from a sharp tip was used to manipulate the structure of silk fibroin from random coil to beta sheet and the emission formed nanoscale latent patterns with a critical dimension (CD) of ∼50 nm. To demonstrate the versatility of the method, we patterned standard and complex shapes. This method is particularly attractive due to its ease of operation without relying on a vacuum or a special gaseous environment and without any need for complex electronics or optics. Therefore, this study paves a practical and cost-effective way toward patterning biopolymers at ultra-high level resolution.

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Section: Introductionmentioning

confidence: 99%

Silk as a biodegradable resist for field-emission scanning probe lithography

Bicer¹,

Kumar²,

Melikov³

et al. 2020

Nanotechnology

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“…Inspired by microcontact printing − and the ancient material silk, , we introduce a lithographic technique for resource-limited settings. Silk has been successfully applied to various lithographic methods, − including electron beam lithography, , soft-lithography, − and photolithography; − however, these methods require complex and skill-intensive processing steps and expensive instrumentation. Thus, we present here a simple, inexpensive, quick, portable, and convenient method for generating micropatterns on both planar and flexible surfaces.…”

Section: Introductionmentioning

confidence: 99%

Silk-Based Aqueous Microcontact Printing

Kumar

Melikov

Aria

et al. 2018

ACS Biomater. Sci. Eng.

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Lithography, the transfer of patterns to a film or substrate, is the basis by which many modern technological devices and components are produced. However, established lithographic approaches generally use complex techniques, expensive equipment, and advanced materials. Here, we introduce a water-based microcontact printing method using silk that is simple, inexpensive, ecofriendly, and recyclable. Whereas the traditional microcontact printing technique facilitates only negative lithography, the synergetic interaction of the silk, water, and common chemicals in our technique enables both positive and negative patterning using a single stamp. Among diverse application possibilities, we exemplify a proof of concept of the method through optimizing its metal lift-off process and demonstrate the fabrication of electromagnetic metamaterial elements on both solid and flexible substrates. The results indicate that the method demonstrated herein is universally applicable to device production and technology development.

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Near-field Thermal Nanolithography Using Silk Proteins

Cited by 2 publications

References 2 publications

Silk as a biodegradable resist for field-emission scanning probe lithography

Silk as a biodegradable resist for field-emission scanning probe lithography

Silk-Based Aqueous Microcontact Printing

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