Circular craters with diameters of 500 nm are fabricated on the surface of fused silica by femtosecond ultravioletinfrared (UV-IR) pulse trains with 0.8 nJ UV pulse energy. UV damage thresholds at different IR energies and UV-IR delays are measured. Diameters and depths of the ablated craters can be modified by adding the IR pulse and varying the UV-IR delays. These results demonstrate the feasibility of nanomachining using short wavelength lasers with pulse energy far below normal damage thresholds. Femtosecond lasers have been used to fabricate various types of microstructures, such as waveguides, microfluidic networks, and three-dimensional (3D) data storage devices [1][2][3]. However, with conventional femtosecond systems operating at infrared wavelengths, fabricating these structures at nanometer scales requires high numerical aperture (NA) optics [4,5], precise control of pulse energy [6], or additional material processing steps [7]. Alternatively, by focusing short wavelength beams, such as ultraviolet (UV) and soft x-ray beams, features with sizes ranging from 80 to 600 nm have been fabricated [8][9][10]. While increasing energy output is still an ongoing research in generating short wavelength laser pulses, and indeed XUV pulses with 100 nJ have been reported [11], a machining technique requiring low pulse energies is still desired for practical applications, especially because of the low conversion efficiency in obtaining these beams. Our previous results show that by a combination of UV and IR beams, nanoscale features can be fabricated on fused silica with the UV pulse energy at only 10% of its normal value [12]. However, only line-shaped damage is achieved because of imperfect UV beam quality. In this Letter, we apply a home-built spatial filter to improve the UV beam quality, and fabricate circular craters with diameters of 500 nm on the surface of fused silica, with the minimal UV pulse energy of 0.8 nJ using a UV-IR pulse train. These results demonstrate the feasibility of nanomachining using short wavelength lasers, even with their pulse energy far below normal damage thresholds. Figure 1 shows the experimental setup. Synchronized femtosecond UV (266 nm) and IR (800 nm) pulses are generated from the same Ti:sapphire laser that operates at a repetition rate of 1 kHz and delivers 60 fs (full width at half-maximum, FWHM) IR pulses. The UV beam (estimated pulse duration 70 fs FWHM), generated from third-harmonic generation (THG) [13], first goes through a spatial filter which consists of two thin lenses (L1, f 500 mm and L2, f 1 m), and a pinhole drilled through a borosilicate microscope cover glass (thickness 150 μm) by another IR beam. The estimated UV pulse duration after L2 is 85 fs because of dispersion of the two lenses. The diameter of the pinhole matches the calculated focal spot size of L1. Lenses L1 and L2 also form a 2× beam expander so that the filtered UV beam with a smooth Gaussian profile overfills the input aperture of the reflecting objective (RO, Edmund, 0.5 NA, working Fig. 1. (a)...