“…1,2,7-9 Among these streaming phenomena, surface acoustic wave nebulization (SAWN) has been studied extensively due to its wide potential applications in targeted drug delivery, patterning of nanoparticles, cell or protein generation, inhalation therapy, mass spectrometric analysis, deposition of biochemical films, etc. [9][10][11][12][13][14][15][16] Recently, there has been an increasing interest in SAW based microfluidic devices using high performance piezoelectric thin film materials, such as ZnO. [17][18][19][20][21] These ZnO films, typically a few micron thick, deposited on silicon, glass, or polymer, have advantages compared with using bulk materials such as LiNbO 3 or quartz.…”