2023
DOI: 10.1002/smll.202304445
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Negative Capacitance Field Effect Transistors based on Van der Waals 2D Materials

Ruo‐Si Chen,
Yuerui Lu

Abstract: Steep subthreshold swing (SS) is a decisive index for low energy consumption devices. However, the SS of conventional field effect transistors (FETs) has suffered from Boltzmann Tyranny, which limits the scaling of SS to sub‐60 mV dec−1 at room temperature. Ferroelectric gate stack with negative capacitance (NC) is proved to reduce the SS effectively by the amplification of the gate voltage. With the application of 2D ferroelectric materials, the NC FETs can be further improved in performance and downscaled to… Show more

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Cited by 2 publications
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“…Additionally, the insertion of a BN dielectric layer forms a good vdW contact, resulting in lower gate leakage and steeper SS, as well as a smaller hysteresis window. To attain high-performance 2D ferroelectric gate stacks for 2D NCFETs, factors such as the physical parameters of ferroelectric materials, capacitance matching between ferroelectric layers and semiconductors, and hysteresis effects need consideration during fabrication and operation [554].…”
Section: Negative-capacitance Fetmentioning
confidence: 99%
“…Additionally, the insertion of a BN dielectric layer forms a good vdW contact, resulting in lower gate leakage and steeper SS, as well as a smaller hysteresis window. To attain high-performance 2D ferroelectric gate stacks for 2D NCFETs, factors such as the physical parameters of ferroelectric materials, capacitance matching between ferroelectric layers and semiconductors, and hysteresis effects need consideration during fabrication and operation [554].…”
Section: Negative-capacitance Fetmentioning
confidence: 99%