“…For this study, we have selected an oxide ceramic target (Al 2 O 3 ), i.e. a simple binary oxide formed by a low-mass metal as opposed to earlier studies that involved complex oxides [8,9,12,13]. On the one hand, transparent and high refractive index films and waveguides could be obtained by PLD of ceramic Al 2 O 3 in vacuum [16,17] and thus, any possible contribution of gas species in producing negative ions [12,13] can be ruled out.…”