2019
DOI: 10.1002/pssa.201800693
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Negative Magnetoresistance in Si Nanograting Layers

Abstract: Experimental measurements of low-temperature electron transport across Si nanogratings with 200 nm period are reported. The structure is fabricated of silicon on insulator layer using laser interference lithography followed by reactive ion etching. For transport measurements, macroscopic Hall bar formed in the patterned layer is used. The main result is negative magnetoresistance observed for temperatures lower than 60 K and not saturating in magnetic fields up to 9 Tesla. It is interpreted in terms of weak lo… Show more

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Cited by 10 publications
(10 citation statements)
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“…Thermopower measurements demonstrate that the NG islands are n-type. Transport measurements (resistivity and Hall coefficient) confirm that they are n-type and resistivity decreases at low temperatures [19,20]. These results are in agreement with G-doping theory.…”
Section: Sample Preparation and Characterizationsupporting
confidence: 85%
“…Thermopower measurements demonstrate that the NG islands are n-type. Transport measurements (resistivity and Hall coefficient) confirm that they are n-type and resistivity decreases at low temperatures [19,20]. These results are in agreement with G-doping theory.…”
Section: Sample Preparation and Characterizationsupporting
confidence: 85%
“…A coherent laser with a wavelength of 375 nm and a Lloyd interferometer were used for the interference lithography. The reactive ion etching of Si was performed using CF 4 , as described in [ 5 , 13 ]. The reactive ion etching time was adjusted to 35 s to achieve an indent depth of 10 nm ( Figure 3 a).…”
Section: Methodsmentioning
confidence: 99%
“…The indent depth was monitored by scanning a plain area (adjacent to the NG layer) using a profile meter. The cross-section of the NG layer was sinusoidal (see Figure 1 of [ 13 ]), which is characteristic of NG layers prepared by laser interference lithography. Finally, a metal was deposited on the back side of the chip to achieve ohmic contact: Al was deposited on the p-type and p + -type substrates by thermal evaporation and Ti/Ag was deposited on the n-type and n + -type silicon substrates by magnetron sputtering, as described in [ 24 ].…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…Current developments in nanotechnology have enabled patterning the surface of semiconductor layers by nanoscale gratings with periodical arrays of width smaller than 1 µm [1][2][3][4]. Nanograting (NG) patterns have been shown to dramatically change the electronic [5][6][7], magnetic [8,9], optical [10][11][12][13][14], and electron emission [15,16] properties of the semiconductor substrate when the grating depth becomes comparable with de Broglie wavelength of electrons. This can be attributed to the special boundary conditions enforced by the NG on the wave function.…”
Section: Introductionmentioning
confidence: 99%