Negatively Charged Al2O3 Layers Deposited by Magnetron Sputtering and Vacuum Evaporation for Crystalline Silicon Solar Cell BSF

Poruba, A.; Cech, P.; Oulehla, Jindřich; Barinka, R.; Vyskočil, Jiří; Kadlec, S.; Hegr, O.

doi:10.4229/26theupvsec2011-2bv.3.65

26th European Photovoltaic Solar Energy Conference and Exhibition; 1783-1786 2011

DOI: 10.4229/26theupvsec2011-2bv.3.65

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Negatively Charged Al2O3 Layers Deposited by Magnetron Sputtering and Vacuum Evaporation for Crystalline Silicon Solar Cell BSF

A. Poruba¹,

P. Cech²,

Jindřich Oulehla³

et al.

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Negatively Charged Al2O3 Layers Deposited by Magnetron Sputtering and Vacuum Evaporation for Crystalline Silicon Solar Cell BSF

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