NEMS/MEMS cantilever-based biosensors: addressing the open issues

Abstract

The impressive developments in micro / nano-electro-mechanical-systems (MEMS; NEMS) have led to a new class of chemical and biological sensors based on micro and nano cantilevers. This work focuses on fabrication challenges of flat cantilevers exhibiting well-controlled, uniform and reproducible mechanical performance. Our experimental study is based on cantilevers made of crystalline silicon (c-Si), using SOI wafers as the starting material and using bulk micromachining. Experimental results on fabrication and characterization of composite porous silicon-crystalline silicon microcantilevers made of SOI wafers are also presented, where the porous silicon surface provides an excellent interface for immobilization of the biosensing layer. The optimal geometric design of microcantilevers depending on the application as well on the selected sensing mode (static or dynamic) is considered. The innovative aspects and open issues of NEMS/MEMS cantilever-based biosensors are addressed

Isotope Effect in the Interaction between Gas-Phase Isotopologues and Polymer-Coated Porous Silicon Over Silicon Microcantilevers

“…Microcantilevers have gained much attention in recent years as a promising platform for biomechanical as well as chemomechanical sensors. − Different groups have reported the ability to detect different chemical substances, including explosives and warfare agents. , Microcantilever-based systems also allow label-free , real-time monitoring of chemical and biological processes such as sequence specific DNA hybridization and drug-target binding interactions . Recently, because of their high sensitivity, microcantilevers have been used to measure the physical properties of polymers near their glass transition temperature. , …”