“…Focused ion beams are promising in this context, with several empirical demonstrations of their capability to image [22,23], characterize [24], create point defects in [17,18,25], otherwise alter atomic structure of [19,20,[26][27][28][29][30][31], and tune mechanical [25] and electronic [29] properties of 2D materials. However, ion beam parameters must be specially tuned for 2D materials because they exhibit a highly pre-equilibrium response to ion irradiation which differs from bulk and thin films: Highly-charged ions partially neutralize [32,33] and reach an equilibrium charge state only after traversing ∼10 nm of material [34,35], leading to deviations from bulk behavior for atomically thin systems [36]. Even in the case of proton irradiation, surface plasmons are predicted to enhance energy deposition [37], and the radically different plasmonic properties of 2D materials [38,39] should further influence charge and energy transfer processes upon ion impact.…”