Abstract:The interaction of ion beams with dielectric materials is an urgent problem, both from the point of view of practical application in ion implantation processes and for understanding the fundamental processes of charge compensation and the effective interaction of beam ions with a target surface. This paper presents the results of studies of the processes of compensation of the surface charge of an insulated collector upon interaction with a beam of metal ions with energies up to 50–150 keV. At low pressure (ab… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.