New 3D surface profile measurement based on phase-shift interfering technology
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Cited by 2 publications
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Equipment with a bifocus objective lens to detect the profile of a supersmooth surface in three dimensions is presented. The basic optical system is an interference system with a fully common optical path. Such an optical structure, which includes the bifocus lens and interference system, can result in the optical common ejection effect. Furthermore, by the electronic common ejection, the instrument can detect the profile within 0.1 nm vertically and 1 m laterally. The principle of the optical common ejection and the structure of this equipment is described in detail. InstructionAs a result of the development of fine manufacturing, such as the micro-objective lens, the compact disk, and superlarge integrated circuit, it has become more and more important to know very clearly when the microstructure of the surface is raised. Most current commercial instruments can detect the surface profile in only two dimensions. By using our sensor, we can detect one curve or some disperse curves around the traverse section of the surface. These curves, which partially indicate the surface feature of the workpiece, do not meet the needs of research or production. To achieve a panorama, it is necessary to develop equipment to show the 3-D configuration of the surface. 1 We already successfully developed an interference microscope to detect nondestructively the 2-D profile. On the basis of the 2-D interference microscope, we develop a high-precision 3-D profiler to detect the surface in three dimensions, which subtly probe 100ϫ100 ͑a total of 10,000͒ points in a small 0.08-ϫ0.08-mm square of the surface. According to the result of the data process, the instrument provides several suggestions concerning the direction, numbers, size, and layout of the waveforms of the profile. 2 In our instrument, a bifocus lens is applied to form a fully common path interference system. This system, in cooperation with the signal processing circuits, has a strong ability to withstand ambient interfere such as shock, air disturbance, thermal fluctuations, etc. Its vertical resolution is better than 0.1 nm and its lateral resolution is better than 1 m by a special data processing that enhances the lateral resolution. The curvature radius of the work piece ranges between Ϯ5 and 25 mm, and the curvature style contains a plate, a sphere, and a column surface. Figure 1 shows the optical structure of the instrument. A He-Ne laser, as a source, provides linear polarized light. StructureThe pin light is radially spread to a wide parallel beam by collimator L 1 . After passing through /2 wave plate and splitter BS 1 , the parallel linear polarization beam is split into two beams, one of which is transmission and the other is reflection. The dispersing beam goes straightly into bifocus lens L 2 .The bifocus lens is similar to an ordinary lens but one of the lenses is made of calcite. As is known, calcite is an anisotropic crystal that can provide the efficiency of double refraction. On passing through this crystal, the light is split into two polarized parts,...
Equipment with a bifocus objective lens to detect the profile of a supersmooth surface in three dimensions is presented. The basic optical system is an interference system with a fully common optical path. Such an optical structure, which includes the bifocus lens and interference system, can result in the optical common ejection effect. Furthermore, by the electronic common ejection, the instrument can detect the profile within 0.1 nm vertically and 1 m laterally. The principle of the optical common ejection and the structure of this equipment is described in detail. InstructionAs a result of the development of fine manufacturing, such as the micro-objective lens, the compact disk, and superlarge integrated circuit, it has become more and more important to know very clearly when the microstructure of the surface is raised. Most current commercial instruments can detect the surface profile in only two dimensions. By using our sensor, we can detect one curve or some disperse curves around the traverse section of the surface. These curves, which partially indicate the surface feature of the workpiece, do not meet the needs of research or production. To achieve a panorama, it is necessary to develop equipment to show the 3-D configuration of the surface. 1 We already successfully developed an interference microscope to detect nondestructively the 2-D profile. On the basis of the 2-D interference microscope, we develop a high-precision 3-D profiler to detect the surface in three dimensions, which subtly probe 100ϫ100 ͑a total of 10,000͒ points in a small 0.08-ϫ0.08-mm square of the surface. According to the result of the data process, the instrument provides several suggestions concerning the direction, numbers, size, and layout of the waveforms of the profile. 2 In our instrument, a bifocus lens is applied to form a fully common path interference system. This system, in cooperation with the signal processing circuits, has a strong ability to withstand ambient interfere such as shock, air disturbance, thermal fluctuations, etc. Its vertical resolution is better than 0.1 nm and its lateral resolution is better than 1 m by a special data processing that enhances the lateral resolution. The curvature radius of the work piece ranges between Ϯ5 and 25 mm, and the curvature style contains a plate, a sphere, and a column surface. Figure 1 shows the optical structure of the instrument. A He-Ne laser, as a source, provides linear polarized light. StructureThe pin light is radially spread to a wide parallel beam by collimator L 1 . After passing through /2 wave plate and splitter BS 1 , the parallel linear polarization beam is split into two beams, one of which is transmission and the other is reflection. The dispersing beam goes straightly into bifocus lens L 2 .The bifocus lens is similar to an ordinary lens but one of the lenses is made of calcite. As is known, calcite is an anisotropic crystal that can provide the efficiency of double refraction. On passing through this crystal, the light is split into two polarized parts,...
This paper presents the inspection technology for a freeform surface component which is named F-theta lens. F-theta lens is widely used in laser scanners, printers, etc. Freeform characterization is one of the main approaches to verify the manufacturing precision of freeform surface. At present, there is still a lack of techniques for the characterization of freeform surfaces. This study aimed to explore some approaches to inspect freeform surfaces. Two types of measurement methods, namely contact and non-contact measurement methods, are employed to measure the F-theta lens surface. The pros and cons, the existing problems, different applications and areas for improvement of the two methods are discussed. A series of advanced measuring instruments are used in the measurement process. A brief description of measurement mechanisms of these instruments is also presented. As a whole, this paper contributes to the development of the precision measurement technology for optical freeform surfaces.
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