2020
DOI: 10.1063/5.0003268
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New approaches for achieving more perfect transition metal oxide thin films

Abstract: This perspective considers the enormous promise of epitaxial functional transition metal oxide thin films for future applications in low power electronic and energy applications since they offer wide-ranging and highly tunable functionalities and multifunctionalities, unrivaled among other classes of materials. It also considers the great challenges that must be overcome for transition metal oxide thin films to meet what is needed in the application domain. These challenges arise from the presence of intrinsic… Show more

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Cited by 82 publications
(61 citation statements)
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“…Recently, with the simultaneous advances in thin film synthesis, characterization, and modelling of TMOs, engineering the defects and interface in TMOs have been widely explored as a route to enhance and even create novel functionalities in TMOs for new devices. 1 Although significant progresses have been made in the past decade (will be discussed later), a deep understanding of the defect chemistry in complex TMOs still lag behind that in conventional semiconductors. This is because: (1) TMOs have many constituent elements and can accommodate a wide variety of defects, including oxygen vacancies (V O ), cation vacancies (V C ), interstitial defects, local structural distortions, grain boundaries, domain walls, misfit dislocations, and impurities such as H +/À , Li + , etc.…”
Section: Background For Complex Transition-metal Oxidesmentioning
confidence: 99%
See 1 more Smart Citation
“…Recently, with the simultaneous advances in thin film synthesis, characterization, and modelling of TMOs, engineering the defects and interface in TMOs have been widely explored as a route to enhance and even create novel functionalities in TMOs for new devices. 1 Although significant progresses have been made in the past decade (will be discussed later), a deep understanding of the defect chemistry in complex TMOs still lag behind that in conventional semiconductors. This is because: (1) TMOs have many constituent elements and can accommodate a wide variety of defects, including oxygen vacancies (V O ), cation vacancies (V C ), interstitial defects, local structural distortions, grain boundaries, domain walls, misfit dislocations, and impurities such as H +/À , Li + , etc.…”
Section: Background For Complex Transition-metal Oxidesmentioning
confidence: 99%
“…1 Although significant progresses have been made in the past decade (will be discussed later), a deep understanding of the defect chemistry in complex TMOs still lag behind that in conventional semiconductors. This is because: (1) TMOs have many constituent elements and can accommodate a wide variety of defects, including oxygen vacancies (V O ), cation vacancies (V C ), interstitial defects, local structural distortions, grain boundaries, domain walls, misfit dislocations, and impurities such as H +/À , Li + , etc. (2) Due to the ionic nature of TMOs, the transition energy of defects in TMOs are usually high and the extra charges left by defects are usually localized, therefore defects in TMOs usually cannot lead to a significant change in the electrical conductivity as present in conventional semiconductors.…”
Section: Background For Complex Transition-metal Oxidesmentioning
confidence: 99%
“…[25,26] Physical synthesis approaches (i.e., pulsed laser deposition, molecular beam epitaxy) of high-quality metal-oxides thin films have been developed and continuously improved in the past three decades. [27] Common denominators in these methods are the use of lattice-matched substrates materials, which enable epitaxial growth, and the ability to deposit and/or post-anneal at high temperatures (≤1000 °C). However, the majority of thinfilm photoelectrodes are polycrystalline and involve the use of polycrystalline transparent conductive substrates with moderated thermal stabilities (≤550 °C) in their fabrication.…”
Section: Introductionmentioning
confidence: 99%
“…Other mechanisms involve tuning the Schottky barrier height, as well as charge‐trapping processes which are highly dependent on defect concentration. All switching processes relate to control of defect concentration, but this is difficult to achieve in oxides by standard deposition methods 182 . To achieve greater performance in oxides, elimination of conductive filaments is necessary, as well as very careful control of oxygen vacancy concentrations, other intrinsic defect concentrations, and background electronic concentrations.…”
Section: Nickel Oxide Thin Films In Devicesmentioning
confidence: 99%