New comprehensive metrics and methodology for metrology tool fleet matching

Solecky, Eric; Archie, Charles N.; Banke, Bill

doi:10.1117/12.602330

Cited by 16 publications

(18 citation statements)

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“…Before the FMP and TMP publications the prior art was not clear. A brief summary of the philosophy is included, for more information please see reference [3]. It is desirable to represent the fleet with one metric that captures the measurement variation of the entire fleet for the given situation, this value is FMP.…”

Section: Grr Utilizes the Fleet Measurement Precision (Fmp) Andmentioning

confidence: 99%

Reducing metrology mean-time-to-detect by utilizing product data

Crauder

Solecky

Emans

2016

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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The limitations of existing methodology to maintain metrology fleet matching and stability is being strained by increasingly complex integrations. As the number of measurements also increase within the integration, the ability to quickly detect issues on metrology is critical to prevent product excursions. This paper will review the traditional methodologies for metrology fleet matching and stability and propose a new methodology. A strong emphasis will be placed on using product data to detect tool issues in real time via Pooled and Normalized Product Data Analysis to improve Mean-Time-To-Detect.

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Section: Grr Utilizes the Fleet Measurement Precision (Fmp) Andmentioning

confidence: 99%

Reducing metrology mean-time-to-detect by utilizing product data

Crauder

Solecky

Emans

2016

2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)

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“…The height of each bar ( axis) represents each tool's contribution ( axis) to the overall measurement uncertainty [i.e., tool matching precision (TMP)]. The grayscale shadings within each bar represent how each tool's matching contributors-precision, offset, slope-induced-shift offset (SiSoffset, i.e., a difference between the slope responses of different tools to the reference fleet average which results in a nonconstant offset when deviating from unity) and nonlinearity (the remaining scatter not explained by other terms), described elsewhere in more detail [3]- [5]-affects the overall measurement uncertainty (FMP). As this example demonstrates, with proper expertise and more appropriate metrics and methodologies, the measurement uncertainty can be assessed more rigorously and diagnostically, with each contributor better understood.…”

Section: A Elements Of Uncertaintymentioning

confidence: 99%

“…It should be noted that traditional "rule-of-thumb" value for a good C of 1.33 may be valid for noncritical layers, but in new paradigm of advanced process control (APC) and need for as tight a process as possible, this value is insufficient; for tighter processes, metrology improvements are ever more important for maximizing C . and methods [3]- [5]. The heavy upper dark gray line (which is marked by FMP = 3.3nm) is the overall measurement uncertainty of the fleet [i.e., fleet measurement precision (FMP)] over a given time frame.…”

Section: A Elements Of Uncertaintymentioning

confidence: 99%

Value-Added Metrology

Bunday¹,

Allgair²,

Caldwell³

et al. 2007

IEEE Trans. Semicond. Manufact.

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The conventional premise, long-touted among the semiconductor processing community, that metrology is a "non-value-added necessary evil," is a misleading and dangerous assertion, which must be viewed as obsolete thinking. Many metrology applications are key enablers to traditionally labeled "value-added" processing steps in lithography and etch, such that they can be considered integral parts of the processes.Various key trends in modern, state-of-the-art processing such as optical proximity correction, design for manufacturability, and advanced process control are based, at their hearts, on the assumption of fine-tuned metrology, in terms of uncertainty and accuracy. These trends are vehicles where metrology thus has large opportunities to create value through the engineering of tight and targetable process distributions. Such distributions make possible predictability in speed-sorts and in other parameters, which results in a high-end product. Additionally, significant reliance has also been placed on defect metrology to predict, improve, and reduce yield variability. The necessary quality metrology is strongly influenced by not only the choice of equipment, but also the quality application of these tools in a production environment. The ultimate value added by metrology is a result of quality tools run by a quality metrology team using quality practices. This paper will explore the relationships among present and future trends and challenges in metrology, including equipment, key applications, and metrology deployment in the manufacturing flow. Of key importance are metrology personnel, with their expertise, practices, and metrics in achieving and maintaining the required level of metrology performance, including where precision, matching, and accuracy fit into these considerations. The value of metrology will be demonstrated to have shifted to being a "key enabler of large revenues," debunking the out-of-date premise that metrology is "non-value-added." Index Terms-Advanced process control (APC), critical dimension (CD), design-based metrology (DBM), design for manufacturability (DFM), ISMI, metrology, optical proximity correction (OPC).

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“…Without the proper expertise and summary/diagnostic metrics, it is difficult to conclude whether this is truly the case, and if not, why. Figure 2 summarizes the same data set in a different way, using newly defined matching metrics and methods [3,4,5]. The blue line is the overall 3cr measurement uncertainty of the fleet (i.e., Fleet Measurement Precision, FMP) over a given timeframe.…”

Section: Importance Of Metrologymentioning

confidence: 99%

“…The height of each bar (y-axis) represents each tool's contribution (xaxis) to the overall measurement uncertainty (i.e., Tool Matching Precision, TMP). The color shadings within each bar represent how each tool matching contributor, described elsewhere [3,4,5], is affecting each tool's measurement uncertainty (TMP). With proper expertise and more appropriate metrics and methodologies, the measurement uncertainty can be assessed more realistically and diagnostically, with each contributor better understood.…”

Section: Importance Of Metrologymentioning

confidence: 99%

The ROI of Metrology

Bunday¹,

Allgair

Caldwell³

et al. 2006

2006 IEEE International Symposium on Semiconductor Manufacturing

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The conventional premise that metrology is a is the result of the metrology team executing its job correctly "non-value-added necessary evil" is a misleading one, which and thoroughly. mufst he viewed as obsolete thinking. Much oJf the metrololQv requirements are now key enablers to traditionally labeled "value-added" processing steps in lithography and etch, such that they can be considered integral parts ofthe processes. This paper will explore the present and future trends and challenges in CD metrology. However, equipment is only part of the battle. The quality application of these tools in a production environment is quite important; the ultimate valueadded by metrology is a result ofquality tools run by a quality metrology team using quality practices.

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New comprehensive metrics and methodology for metrology tool fleet matching

Cited by 16 publications

References 0 publications

Reducing metrology mean-time-to-detect by utilizing product data

Reducing metrology mean-time-to-detect by utilizing product data

Value-Added Metrology

The ROI of Metrology

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