2007
DOI: 10.1063/1.2771080
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New delay-integration method for resolving individual components of a pair of composite signals

Abstract: Many scientific measurements are actually a composite of two or more indirectly measured values. A distance measurement, for example, is actually a measurement of the true distance and some amount of error added together. A new method for decomposing a pair of such composite signals into their individual components in certain situations is described. The method utilizes a delay time difference between the components in each of the two composite signals to provide information necessary to reconstruct the indivi… Show more

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“…A technique developed by Petrek and Bhushan (2007), known as the ''delay-integration method'', overcomes the major limitations of the Fotonic edge monitoring technique, the dual probe technique, and the data track monitoring technique. The delay integration method relies on a second edge probe placed in series with the first to provide additional information needed to differentiate between the LTM and edge roughness components.…”
Section: Comparison Of Ltm Measurement Techniquesmentioning
confidence: 99%
“…A technique developed by Petrek and Bhushan (2007), known as the ''delay-integration method'', overcomes the major limitations of the Fotonic edge monitoring technique, the dual probe technique, and the data track monitoring technique. The delay integration method relies on a second edge probe placed in series with the first to provide additional information needed to differentiate between the LTM and edge roughness components.…”
Section: Comparison Of Ltm Measurement Techniquesmentioning
confidence: 99%