New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes

Geiger, W.; Folkmer, B.; Sobe, Udo; Sandmaier, H.; Lang, Walter

doi:10.1016/s0924-4247(97)01758-5

Cited by 35 publications

(17 citation statements)

References 2 publications

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“…The relationship between FRs and DPs is shown in Table 5. Thus design has to be performed according to the sequence as indicated by equation (4). The first design activity is the adjustment of DP3, the second is DP2 and the third is DP1.…”

Section: Robust Design Of the Vibratory Gyroscope With Unbalanced Innmentioning

confidence: 99%

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Robust design of a vibratory gyroscope with an unbalanced inner torsion gimbal using axiomatic design

Hwang

Lee

Park

et al. 2002

J. Micromech. Microeng.

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Recently, there has been considerable interest in micro gyroscopes made of silicon chips. It can be applied to many micro-electro-mechanical systems (MEMS): devices for stabilization, general rate control, directional pointing, autopilot systems, and missile control. The mechanical design of the gyroscope is carried out using axiomatic design, followed by the application of the Taguchi robust design method to determine the dimensions of the parts so as to accommodate the dimensional variations during fabrication. Functional requirements are defined twofold. One is the natural frequencies should have fixed values, and the other is the system should be robust to large tolerances. According to the Independence Axiom, design parameters are classified into a few groups. Then, the detailed design process is performed according to the sequence indicated by the design matrix. The dimensions of the structure are determined to have constant values for the difference of frequencies regardless of the tolerances. It is noted that the Taguchi concept is utilized as a unit process of the entire axiomatic approach.

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Section: Robust Design Of the Vibratory Gyroscope With Unbalanced Innmentioning

confidence: 99%

“…Their products were limited in size and costly because of the precision manufacturing process. Recently, there has been interest in the applications of silicon-made micro vibratory gyroscope because the size and cost could be considerably reduced [1][2][3][4].…”

Section: Introductionmentioning

confidence: 99%

Robust design of a vibratory gyroscope with an unbalanced inner torsion gimbal using axiomatic design

Hwang

Lee

Park

et al. 2002

J. Micromech. Microeng.

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show abstract

“…Some employ the linear vibration of a mass along the substrate plane(1)- (3), and others make use of out-of-plane movement(4), (5). The basic layout of the resonator is closely related to the fabrication process, and each design has advantages with regard to the simplicity of the process or the superiority of the characteristics.…”

Section: Introductionmentioning

confidence: 99%

Double-frame silicon gyroscope packaged under low pressure by wafer bonding

et al. 2000

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A new design for a "double-frame" vibratory silicon gyroscope is described. The gyroscope consists of two frames and corresponding springs. The inner frame has electrode fingers and is suspended from the outer frame, which has sensing springs.The outer frame is linked to the substrate by driving springs. This decoupling of the lateral driving and sensing motions makes the structure easy to design and improves the S/N ratio. The gyroscope has a glass/silicon/glass structure with through-hole electrodes on one face. It is fabricated by the deep dry etching of silicon and low-pressure wafer-to-wafer anodic bonding. The noise and the linearity is less than 1% for angular rates from -250 toThe overload resistance is over 1500G for 0.5ms, and the reliability of the package has been confirmed.

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“…Similarly, critical damping and electrostatic behavior of perforated proof masses in accelerometers can be highly dependent on etch-hole dimensions [5], [6]. The resolution of certain gyroscopes fabricated by the Bosch process were up to fourth-power sensitive to trench geometry [7]. The accuracy to which thicknesses and gaps are known limited the resolution of M-TEST, an electrostatic pull-in measurement for Manuscript received April 20, 1999; revised November 17, 1999.…”

mentioning

confidence: 99%

Electronically probed measurements of MEMS geometries

Gupta

2000

J. Microelectromech. Syst.

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New designs of micromachined vibrating rate gyroscopes with decoupled oscillation modes

Cited by 35 publications

References 2 publications

Robust design of a vibratory gyroscope with an unbalanced inner torsion gimbal using axiomatic design

Robust design of a vibratory gyroscope with an unbalanced inner torsion gimbal using axiomatic design

Double-frame silicon gyroscope packaged under low pressure by wafer bonding

Electronically probed measurements of MEMS geometries

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