New Digital Readout Electronics for Capacitive Sensors by the Example of Micro-Machined Gyroscopes

Gaisser, A.; Geiger, W.; Link, T.; Niklasch, N.; Merz, J.; Steigmajer, S.; Hauser, A.; Sandmaier, H.; Lang, Walter

doi:10.1007/978-3-642-59497-7_112

Cited by 6 publications

(5 citation statements)

References 2 publications

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“…A calibration software algorithm and PLL are achieved in the DSP to calculate the scale factor and to maintain the primary oscillation, respectively. Figure 32b shows the new digital readout electronics for capacitive measurement [173]. The driving part consists of a phase and an amplitude control loop.…”

Section: Micromachined Gyroscope Circuitrymentioning

confidence: 99%

The Development of Micromachined Gyroscope Structure and Circuitry Technology

Xia

Kong

2014

Sensors

195

107

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This review surveys micromachined gyroscope structure and circuitry technology. The principle of micromachined gyroscopes is first introduced. Then, different kinds of MEMS gyroscope structures, materials and fabrication technologies are illustrated. Micromachined gyroscopes are mainly categorized into micromachined vibrating gyroscopes (MVGs), piezoelectric vibrating gyroscopes (PVGs), surface acoustic wave (SAW) gyroscopes, bulk acoustic wave (BAW) gyroscopes, micromachined electrostatically suspended gyroscopes (MESGs), magnetically suspended gyroscopes (MSGs), micro fiber optic gyroscopes (MFOGs), micro fluid gyroscopes (MFGs), micro atom gyroscopes (MAGs), and special micromachined gyroscopes. Next, the control electronics of micromachined gyroscopes are analyzed. The control circuits are categorized into typical circuitry and special circuitry technologies. The typical circuitry technologies include typical analog circuitry and digital circuitry, while the special circuitry consists of sigma delta, mode matching, temperature/quadrature compensation and novel special technologies. Finally, the characteristics of various typical gyroscopes and their development tendency are discussed and investigated in detail.

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Section: Micromachined Gyroscope Circuitrymentioning

confidence: 99%

The Development of Micromachined Gyroscope Structure and Circuitry Technology

Xia

Kong

2014

Sensors

195

107

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“…Due to a variety of advantages over open-loop such as reduced noise and better stability, all kinds of digital or analog closed-loops are adopted in the gyroscope detection circuits in some literature [ 6 - 12 , 23 ]. In digital closed-loop [ 9 - 11 ], a sigma-delta interface can be functionally implemented to detect the minor motion signal, but the switch noise from sequence control clock probably becomes a noise source if used in the separate circuits here without careful treatment.…”

Section: Design Schemes Of the Smg In Drive And Sense Modesmentioning

confidence: 99%

“…Some ASIC gyroscopes using sigma-delta digital closed-loop has been realized in the lab [ 9 - 11 ], but this architecture is more complex to realize in separate circuitry. In [ 12 ], though digital control loops are successfully perfected for basic performance, two carrier signals (600 kHz and 400 kHz) are required for modulation in the drive and sense modes, respectively, which will increase the circuit complexity. Only a PI (Proportion-integral) controller is designed to control the structure rather than a PID (Proportion-integral-derivative) module, which may result in incomplete control, especially while the microgyroscope works in a complex dynamic environment.…”

Section: Introductionmentioning

confidence: 99%

Development of a Prototype Miniature Silicon Microgyroscope

Xia¹,

Chen²,

Wang³

2009

Sensors

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A miniature vacuum-packaged silicon microgyroscope (SMG) with symmetrical and decoupled structure was designed to prevent unintended coupling between drive and sense modes. To ensure high resonant stability and strong disturbance resisting capacity, a self-oscillating closed-loop circuit including an automatic gain control (AGC) loop based on electrostatic force feedback is adopted in drive mode, while, dual-channel decomposition and reconstruction closed loops are applied in sense mode. Moreover, the temperature effect on its zero bias was characterized experimentally and a practical compensation method is given. The testing results demonstrate that the useful signal and quadrature signal will not interact with each other because their phases are decoupled. Under a scale factor condition of 9.6 mV/°/s, in full measurement range of ± 300 deg/s, the zero bias stability reaches 15°/h with worse-case nonlinearity of 400 ppm, and the temperature variation trend of the SMG bias is thus largely eliminated, so that the maximum bias value is reduced to one tenth of the original after compensation from -40 °C to 80 °C.

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“…The steady response of the resonator to different frequencies is measured with the expensive and cumbersome instruments [2][3][4]. The vibration under different frequencies can be sensed by electrodes [5]. The mechanical vibration is detected by the electrical signal on the electrodes.…”

Section: Introductionmentioning

confidence: 99%

Quality factor measurement based on direct energy method for piezoelectric resonator

2022

Electronics Letters

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This letter presents a new real-time and direct measurement method based on energy for piezoelectric resonator. An analytical model considering the stored energy and dissipation energy for quality factor measurement is built up. Using this novel direct energy method, the quality factor for piezoelectric resonator can be measured in real time. The finite element method simulations are introduced to verify the analytical model. Experiments results agree well with the theoretical model and show that quality factor can be measured by direct energy method. This work provides a new method for quality factor measurement of piezoelectric resonator.

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New Digital Readout Electronics for Capacitive Sensors by the Example of Micro-Machined Gyroscopes

Cited by 6 publications

References 2 publications

The Development of Micromachined Gyroscope Structure and Circuitry Technology

The Development of Micromachined Gyroscope Structure and Circuitry Technology

Development of a Prototype Miniature Silicon Microgyroscope

Quality factor measurement based on direct energy method for piezoelectric resonator

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