New DRIE-Patterned Electrets for Vibration Energy Harvesting

Boisseau, S.; Duret, Alexis; Chaillout, Jean-Jacques; Despesse, Ghislain

doi:10.1051/epjconf/20123302010

Cited by 9 publications

(2 citation statements)

References 19 publications

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“…For similar electret structures and charging procedure to our devices, Boisseau suggests in [26] that the charges are homogeneously distributed over the whole surface. We are however not able to confirm this information for our harvesters due to the large surface of the probe in the non-contacting electrostatic voltmeter.…”

Section: Introductionmentioning

confidence: 86%

Modeling and characterization of electret based vibration energy harvesters in slot-effect configuration

Renaud

Altena

Elfrink

et al. 2015

Smart Mater. Struct.

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The purpose of this article is to elaborate a model and the optimization guidelines for electret based harvesters with a specific electret/electrodes configuration, namely the slot-effect configuration. Slot-effect configured harvesters have been investigated experimentally by several research groups. A model describing their dynamic behavior has also been recently proposed in the literature. However, the simplifications used in the existing model can lead to inaccuracies and a refined analysis is elaborated in the present article. The model is compared with experimental measurements on MEMS fabricated devices with a corrugated electret. The electrodes dimensioning in the MEMS device are chosen so that the harvester behaves in a quasi-linear manner over its full range of displacement. This quasi-linearity simplifies greatly the device optimization. Indeed, the behavior of the developed electrostatic harvester is shown to be very comparable to that of piezoelectric harvesters, which are very well understood and documented. The influence of several design parameters on output power performance is investigated. As long as pull-in and breakdown voltage effects can be avoided, the electret surface potential should be maximized and the air gap minimized. We also investigate theoretically the influence of three types of electret on the generated power: planar, corrugated with partial charge coverage, and corrugated with full charge coverage. With the dimensions corresponding to our MEMS devices, the output power characteristics for the three types of electret are similar. However, it is shown that this is not always true. In some conditions, corrugated electrets with full charge coverage are detrimental for the generated power.

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Section: Introductionmentioning

confidence: 86%

Modeling and characterization of electret based vibration energy harvesters in slot-effect configuration

Renaud

Altena

Elfrink

et al. 2015

Smart Mater. Struct.

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“… CEA-LETI [51] Contrary to the previous methods, the goal of this electret patterning method is to make continuous electret layers. Actually, instead of patterning the electret, it is the substrate of the electret (the silicon wafer) that is patterned thanks to a Deep Reactive Ion Etching (DRIE).…”

Section: Sanyo and The University Of Tokyomentioning

confidence: 99%

Electrostatic Conversion for Vibration Energy Harvesting

Boisseau¹,

Despesse²,

Seddik³

2012

Small-Scale Energy Harvesting

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176

137

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This chapter focuses on vibration energy harvesting using electrostatic converters. It synthesizes the various works carried out on electrostatic devices, from concepts, models and up to prototypes, and covers both standard (electret-free) and electret-based electrostatic vibration energy harvesters (VEH).After introducing the general concept of Vibration Energy Harvesting and the global advantages and drawbacks of electrostatic devices to convert mechanical power into electricity ( §1), we present in details the conversion principles of electret-free and electret-based electrostatic converters and equations that rule them in §2. An overview of electrostatic VEH, comparing the results from several laboratories (powers, sizes, concepts…) is provided in §3. In §4, we introduce several power management circuits dedicated to electrostatic VEH. These circuits are extremely important as they are the only way to turn VEH output powers into viable supply sources for electronic devices (sensors, microcontrollers, RF chips…). Assessments, limits and perspectives of electrostatic VEH are then presented in §5.

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Ferroelectricity

2017

Ferroelectrics

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New DRIE-Patterned Electrets for Vibration Energy Harvesting

Cited by 9 publications

References 19 publications

Modeling and characterization of electret based vibration energy harvesters in slot-effect configuration

Modeling and characterization of electret based vibration energy harvesters in slot-effect configuration

Electrostatic Conversion for Vibration Energy Harvesting

Ferroelectricity

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