TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference 2009
DOI: 10.1109/sensor.2009.5285739
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New electromagnetic transduction micro-sensor concept for passive wireless pressure monitoring application

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Cited by 15 publications
(6 citation statements)
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“…In previous works, a wireless pressure sensor based on the electromagnetic (EM) transduction has been proposed, analyzed and designed [6][7][8]. Such wireless EM pressure sensor is composed of four parts: a substrate, a coplanar resonator, an air cavity and a membrane.…”
Section: Introductionmentioning
confidence: 99%
“…In previous works, a wireless pressure sensor based on the electromagnetic (EM) transduction has been proposed, analyzed and designed [6][7][8]. Such wireless EM pressure sensor is composed of four parts: a substrate, a coplanar resonator, an air cavity and a membrane.…”
Section: Introductionmentioning
confidence: 99%
“…In many rising applications a wired connection between the sensor and the data processing system cannot be installed and a need increases for wireless sensors that require no active elements such as power supplies, signal processing circuits or batteries. Recently the first sensor based on the electromagnetic (EM) transduction principle has been reported [1]- [3]. The operating mode of such sensor is the following: an applied pressure force generates a displacement of a thin membrane located above a planar millimeterwave resonator.…”
Section: Introductionmentioning
confidence: 99%
“…Such displacement causes the modification of the electromagnetic field distribution around the resonator and a shift in resonant frequency occurs. Pressure cell prototypes with 50µm high resistivity silicon membrane were fabricated and a sensitivity of 370MHz/bar has been measured [3]. In [4]- [5] the interrogation of such passive sensors by a frequency-modulated signal for the remote measurement of pressure is proposed but no experimental proof of concept has been reported.…”
Section: Introductionmentioning
confidence: 99%
“…The LAAS-CNRS has proposed the first pressure sensor based on the EM Transduction principle [1] (see also, [2,3] for more details dealing with the simulation, the fabrication and the measurement of such passive EM transduction based Pressure sensor) and its wireless interrogation by RADAR signal for the remote measurement of the pressure [4]. The Electromagnetic transduction terminology was given to this kind of sensing transducer because it's based on the following physical phenomenon: The sensor device is composed of a high resistivity silicon membrane which undergoes a deflection when applying a pressure.…”
Section: Introductionmentioning
confidence: 99%