New Evaluation Method for Cross-Contamination of Ion Implantation by Using Grazing Angle Incidence PIXE in Photo-Resist

Shibata, Satoshi; Kamiyanagi, H.; Okano, Takashi; Kitamura, Akira

doi:10.1109/tsm.2010.2048586

Cited by 2 publications

(3 citation statements)

References 9 publications

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“…PIXE analysis was performed at an incident angle of 87° for the proton beam, corresponding to a glancing angle of 3° . The sample was rotated to adjust the incident angle of the proton beam.…”

Section: Particle-induced X-ray Emissionmentioning

confidence: 99%

X-ray Spectrometry

et al. 2011

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I n this Review, we focus on the most significant and essential progress in X-ray spectrometry (XRS) published during the period from January 2010 to August 2011 covering developments and improvements in X-ray optics, X-ray detectors, new quantification models in X-ray spectra and data evaluation, micro-X-ray fluorescence (micro-XRF) including 3D X-ray fluorescence (3D-XRF), elemental imaging techniques, electron probe microanalysis (EPMA), total reflection X-ray fluorescence (TXRF), particle-induced X-ray emission (PIXE) analysis, and X-ray absorption spectrometry (XAS). Herein, we focus on X-ray spectrometry, and thus, X-ray radiography used for only investigating inside structure images and X-ray diffraction (XRD) is not covered. However, we will introduce articles including combinations of these X-ray imaging techniques and other spectroscopic techniques. In addition, different applications in each subfield of XRS, including sample preparation, standard materials, energy-dispersive XRF (ED-XRF), and wavelength-dispersive XRF (WD-XRF), are described. We attempt to look over the current trends in this analytical field by critically citing selected papers to support the research activity of the community of X-ray scientists.Since the previous review on XRS in Analytical Chemistry, an international group of scientists published two overviews on XRS 1,2 in the Journal of Analytical Atomic Spectrometry covering the main fields of XRS analytical spectroscopic methods and instruments. These review articles involve all of the important sections of XRS in nine chapters: reviews, instrumentation, spectrum analysis, matrix correction and calibration, X-ray optics and micro fluorescence, synchrotron radiation (SR), TXRF, portable and mobile X-ray fluorescence (XRF), and online XRF and applications. The section on applications is categorized into geological and industrial minerals, environmental, archeological, cultural heritage, forensic science, etc. These review articles are useful, especially for an overall look at recent XRS research activities.The second edition of the book, "Elements of Modern X-ray Physics", was published. 3 It provides excellent explanations of the basics of X-ray physics, interactions with matter, X-ray sources,

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Section: Particle-induced X-ray Emissionmentioning

confidence: 99%

X-ray Spectrometry

et al. 2011

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“…The technique of GI-XRF is very sensitive even at a depth of a few nm. 267 Two approaches were used to obtain the improvement in LOD. It does, however, suffer from the problem that it does not provide an unambiguous depth-profile and requires a secondary technique to determine the depth of measurement.…”

Section: X-ray-based Techniquesmentioning

confidence: 99%

“…A third paper used grazing angle incidence PIXE to improve the LOD during the analysis of photoresist materials. 267 Two approaches were used to obtain the improvement in LOD. Use of GI-PIXE improved the LOD by an order of magnitude (i.e.…”

Section: X-ray-based Techniquesmentioning

confidence: 99%

Atomic spectrometry update. Industrial analysis: metals, chemicals and advanced materials

Carter

Fisher

Goodall

et al. 2011

J. Anal. At. Spectrom.

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Metals 1.1 Ferrous metals and alloys 1.2 Non-ferrous metals and alloys 2 Chemicals 2.1 Petroleum and petroleum products 2.1.1 Petroleum products -gasoline, diesels, gasohol, exhaust particulates 2.1.2 Fuel -coal, fly ash, particulates/emissions 2.1.3 Oils -crude oil, lubricants 2.1.4 Alternative fuels 2.2 Organic chemicals and solvents 2.2.1 The analysis of archaeological and art objects 2.2.2 LIBS and other laser techniques 2.2.3 Mass spectrometric techniques 2.2.4 Ion beam techniques 2.2.5 Speciation 2.2.6 Extraction, preconcentration and sample introduction 2.3 Inorganic chemicals and acids 2.3.1 Reviews, overviews and CRMs 2.3.2 Cements, concretes and plasters 2.3.3 Matrix modifiers 2.3.4 Forensic applications 2.3.5 Other applications 2.3.6 The analysis of nano-structures 2.3.6.1 Reviews and CRMs 2.3.6.2 Methods of analysis 2.4 Nuclear materials 2.4.1 Reviews and overviews 2.4.2 Nuclear forensic and safeguards applications 2.4.3 Other nuclear applications 3 Advanced materials 3.1 Polymeric materials and composites

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New Evaluation Method for Cross-Contamination of Ion Implantation by Using Grazing Angle Incidence PIXE in Photo-Resist

Cited by 2 publications

References 9 publications

X-ray Spectrometry

X-ray Spectrometry

Atomic spectrometry update. Industrial analysis: metals, chemicals and advanced materials

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