New experimental findings on SILC and SBD of ultra-thin gate oxides

Chen, M.G.; Liu, C.H.; Lee, M.T.; Fu, Kuan–Yu

doi:10.1109/irws.1999.830570

1999 IEEE International Integrated Reliability Workshop Final Report (Cat. No. 99TH8460)

DOI: 10.1109/irws.1999.830570

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New experimental findings on SILC and SBD of ultra-thin gate oxides

M.G. Chen

C.H. Liu

M.T. Lee

et al.

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New experimental findings on SILC and SBD of ultra-thin gate oxides

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References 14 publications

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