New hardware for radio frequency powered glow discharge spectroscopies and its capabilities for analytical applications

Hoffmann, Volker; Uhlemann, H.-J.; Präßler, Frank; Wetzig, K.; Birus, D.

doi:10.1007/s0021663550826

Cited by 46 publications

(35 citation statements)

References 6 publications

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“…The chemical composition of the as-deposited and the annealed samples was determined by glow discharge optical spectrometry analysis [6,14] using a Leco SPD-750 surface depth profile emission spectrometer and an Ni 50 Mn 50 reference probe. The Ni concentration found in the films is between 48 and 52 at% and corresponds to the phase diagram region where formation of a stoichiometric Ni 50 Mn 50 phase is expected [15].…”

Section: Sample Characterizationmentioning

confidence: 99%

NiMn/FeNi exchange biasing systems–magnetic and structural characteristics after short annealing close to the phase transition point of the AFM layer

Groudeva‐Zotova¹,

Elefant²,

Kaltofen³

et al. 2004

Journal of Magnetism and Magnetic Materials

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Section: Sample Characterizationmentioning

confidence: 99%

NiMn/FeNi exchange biasing systems–magnetic and structural characteristics after short annealing close to the phase transition point of the AFM layer

Groudeva‐Zotova¹,

Elefant²,

Kaltofen³

et al. 2004

Journal of Magnetism and Magnetic Materials

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“…We used GDOES to clarify this point. Because of the non-conducting substrate, we applied our self-developed radiofrequency equipment, a new and very suitable device for studying vertical concentration variations [59]. For series B, the vertical homogeneity was also checked by monitoring the quotient of the Ni and Si evaporation rates during film deposition [55].…”

Section: A Compositionmentioning

confidence: 99%

Metal-insulator transition in amorphousSi1−xNix:Evidence for Mott’s minimum metallic conductivity

et al. 1999

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We study the metal-insulator transition in two sets of amorphous Si 1−x Ni x films. The sets were prepared by different, electron-beam-evaporation-based technologies: evaporation of the alloy, and gradient deposition from separate Ni and Si crucibles. The characterization included electron and scanning tunneling microscopy, glow discharge optical emission spectroscopy, energy dispersive X-ray analysis, and Rutherford back scattering. Investigating the logarithmic temperature derivative of the conductivity, w = d ln σ/d ln T , we observe that, for insulating samples, w(T ) shows a minimum, increasing at both low and high T . Both the minimum value of w and the corresponding temperature seem to tend to zero as the transition is approached. The analysis of this feature of w(T, x) leads to the conclusion that the transition in Si 1−x Ni x is very likely discontinuous at zero temperature in agreement with Mott's original views. 71.30.+h,71.23.Cq, Typeset using REVT E X

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“…The free-running generator (rf power supply) and the powermeter (rf power measurement) are described in detail in ref. [15].…”

Section: Methodsmentioning

confidence: 99%

Quantitative depth profiling in glow discharge spectroscopies ? A new deconvolution technique to separate effects of an uneven erosion crater shape

Präßler

Hoffmann

Schumann

et al. 1996

Analytical and Bioanalytical Chemistry

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An algorithm is presented as a concept for the quantification in direct current and radiofrequency glow discharge (GD) modes for GD optical emission spectroscopy. The algorithm is divided into excitation and sputtering part and thus it is possible to distinguish between the different excitation processes and to consider equivalent sputtering crater formations in both modes. Intensity-time profiles are affected corresponding to the method by several effects. One important effect is that sputtering occurs at a single time in different depths because of curved crater bottoms, this is usually called crater effect. The main purpose is to introduce an iterative deconvolution technique which for the quantification numerically takes into account the curved sputtering crater bottom. Input data for the deconvolution technique are the calibrated mass-time profile, the partial densities of the sample constituents and the measured final shape of the sputtering crater. Using a relatively simple model for ion sputtering the deconvolution technique improves iteratively the calculated layer structure by means of information on crater formation. The mathematical handling is illustrated for the quantification of a depth profile of a multilayer sample of ten 100 nm layers. The resulting concentration-depth profile reflects excellently the real elemental distribution of the multilayer system.

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New hardware for radio frequency powered glow discharge spectroscopies and its capabilities for analytical applications

Cited by 46 publications

References 6 publications

NiMn/FeNi exchange biasing systems–magnetic and structural characteristics after short annealing close to the phase transition point of the AFM layer

NiMn/FeNi exchange biasing systems–magnetic and structural characteristics after short annealing close to the phase transition point of the AFM layer

Metal-insulator transition in amorphousSi1−xNix:Evidence for Mott’s minimum metallic conductivity

Quantitative depth profiling in glow discharge spectroscopies ? A new deconvolution technique to separate effects of an uneven erosion crater shape

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