An aluminum solid electrolytic capacitor, using poly(3,4-ethylenedioxythiophene) (PEDOT) as a counter electrode, was prepared with hyperbranched poly(siloxysilane)s (HBPSi) to improve an interface of aluminum oxide and PEDOT. Capacitance and equivalent series resistance (ESR) were significantly improved comparing to those without HBPSi.Conductive polymer aluminum solid electrolytic capacitors have attracted considerable attention because of their extremely low impedance at high frequencies and reliability.1-8 The capacitor has various applications in high performance digital equipment. Conductive polymers, such as polypyrrole (PPy) or PEDOT, are used as a counter electrode for aluminum oxide in these capacitors. The properties of the capacitor are strongly influenced by not only the conductivity of the polymers but the affinity between the aluminum oxide and the conductive polymers. It has been reported that addition of vinyltrimethoxysilane or -aminopropyltriethoxysilane to PPy electrolyte solution improves electrical properties such as capacitance and dissipation factor of tantalum solid electrolytic capacitors.9 This could be due to the effect of the siloxane derivatives of organic and inorganic hybrid materials that play a role of affinity between the PPy and the tantalum oxide.HBPSi are of interesting candidates for a new class of organic and inorganic hybrid materials. Because they have a dendritic structure consists of Si-O and hydrocarbon segments with a large number of organic terminated groups that can be easily modified to various functional groups and would play a significant role of connecting with an organic layer. HBPSi, therefore, offers intriguing possibilities for the materials especially as coatings, adhesives, and surfactants. [10][11][12] In this paper, we report that modification of aluminum anodized film by HBPSi increases contact area with PEDOT, and improves the capacitor's characteristics, such as capacitance and ESR.HBPSi with vinyl terminated groups was synthesized by the hydrosilylation of AB 2 monomer, 1,5-divinyl-1,1,3,5,5-pentamethyltrisiloxysilane, in the presence of platinum catalyst at room temperature for 3 h in bulk (Figure 1). Furthermore, we also used crosslinked type HBPSi that prepared with the crosslinking reaction of the resulting HBPSi and 1,1,3,3-tetramethyldisiloxane as a cross linker in the presence of platinum catalyst in toluene at room temperature for 1 h. Molecular weight of as prepared and cross linked polymers was determined by using gel permeation chromatography (GPC) with polystyrene standard. The linear polysiloxanes, vinyl-terminated polydimethylsiloxanes (PDMSi) with two different molecular weights (Shinetsu Polymer DMT-V35, M n ¼ 770 and 49500), were used for the reference samples to HBPSi. Ethylenedioxythiophene (EDOT) and iron p-toluenesulfonate were purchased from H. C. Starck and used without further purification. Figure 2 shows a schematic view of the fabricated device of aluminum solid electrolytic capacitor. An electrochemically etched aluminum fo...