2022
DOI: 10.1016/j.mee.2022.111871
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New insights on Ni-Si system for microelectronics applications

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Cited by 9 publications
(2 citation statements)
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“…Silicon (Si) substrates come in a variety of shapes and sizes, and they are used in both research and industry studies. By increasing light trapping and reducing light reflection, patterned Si is well-liked and frequently used to increase solar cell efficiency 1,2 , for device construction of microelectromechanical systems 3 , and in numerous biological applications 4 . The photovoltaic market is led by silicon solar cells because they are inexpensive, simple to produce, and environmentally friendly 5,6 .…”
Section: Introductionmentioning
confidence: 99%
“…Silicon (Si) substrates come in a variety of shapes and sizes, and they are used in both research and industry studies. By increasing light trapping and reducing light reflection, patterned Si is well-liked and frequently used to increase solar cell efficiency 1,2 , for device construction of microelectromechanical systems 3 , and in numerous biological applications 4 . The photovoltaic market is led by silicon solar cells because they are inexpensive, simple to produce, and environmentally friendly 5,6 .…”
Section: Introductionmentioning
confidence: 99%
“…Mastering the growth of NiSi directly integrated from a silicon substrate remains a major challenge. The complete reaction pathways involved in NiSi formation are still debated [16,[26][27][28][29][30] thus making the industrial integration of Ni-based silicides difficult.…”
Section: -Introductionmentioning
confidence: 99%