2016
DOI: 10.1063/1.4939013
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New method of plasma immersion ion implantation and also deposition of industrial components using tubular fixture and plasma generated inside the tube by high voltage pulses

Abstract: A new method of Plasma Immersion Ion Implantation (PIII) and deposition (PIII and D) for treating industrial components in the batch mode has been developed. A metal tubular fixture is used to allocate the components inside, around, and along the tube, exposing only the parts of each component that are to be ion implanted to the plasma. Hollow cathode-like plasma is generated only inside the tube filled with the desired gas, by applying high negative voltage pulses to the hollow cylindrical fixture which is in… Show more

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Cited by 14 publications
(3 citation statements)
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“…The treatment time was 15 min and the working gas was nitrogen in all cases. Table 2: PIII processing conditions used in the treatment of aluminized polyimide film using the 3IP-CE system (11) . In all treatments, the pulse frequency and duration were 1 kHz and 30 µs, respectively.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The treatment time was 15 min and the working gas was nitrogen in all cases. Table 2: PIII processing conditions used in the treatment of aluminized polyimide film using the 3IP-CE system (11) . In all treatments, the pulse frequency and duration were 1 kHz and 30 µs, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…The film was 25 μm in thickness and metallized with a very thin layer (around 70 nm) of aluminum in one side. The DuPont film was cut in samples of 50 mm × 360 mm, which were treated in two PIII experimental systems (3IP-LAP and 3IP-CE) reported elsewhere (10,11) . The samples were put in the treatment chambers using a stainless steel tube 11 cm of diameter, 20 cm in length, and 2 mm in thickness as the sample holder.…”
Section: Methodsmentioning
confidence: 99%
“…Therefore, it is indispensable to improve the attributes of the inner walls of such tubes. In this respect, several investigations have been performed [2][3][4][5][6][7][8][9][10]. Fujiyama et al proposed coaxial magnetron pulsed plasma (CMPP) and double-ended coaxial magnetron pulsed plasma (DCMPP) methods for coating the inner walls of narrow tubes with the aid of the extended anode effect [11].…”
Section: Introductionmentioning
confidence: 99%