2019
DOI: 10.1364/oe.27.024286
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New observations on DUV radiation at 257 nm and 206 nm produced by a picosecond diode pumped thin-disk laser

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Cited by 24 publications
(6 citation statements)
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“…Laser annealing of the TNT layers was performed by a picosecond diode pumped thin-disk laser source Perla-C developed at the HiLASE centre (fundamental laser wavelength of 1030 nm). 52,53 Fourth harmonics of the laser (l ¼ 257.5 nm) was used for annealing to ensure single photon absorption of laser light by TNT layers. The following irradiation parameters were applied: 89 kHz repetition rate, 2 ps pulse duration, 5 W maximum average power, and $56.2 mJ maximum pulse energy.…”
Section: Experimental and Characterizationmentioning
confidence: 99%
“…Laser annealing of the TNT layers was performed by a picosecond diode pumped thin-disk laser source Perla-C developed at the HiLASE centre (fundamental laser wavelength of 1030 nm). 52,53 Fourth harmonics of the laser (l ¼ 257.5 nm) was used for annealing to ensure single photon absorption of laser light by TNT layers. The following irradiation parameters were applied: 89 kHz repetition rate, 2 ps pulse duration, 5 W maximum average power, and $56.2 mJ maximum pulse energy.…”
Section: Experimental and Characterizationmentioning
confidence: 99%
“…25% from a fundamental one), fourth harmonic frequency generation in a BBO or a CLBO crystal (257.5 nm, conversion efficiency approx. 10% from a fundamental one when generated like a cascaded conversion via a second harmonic frequency) [Novak 2016], and fifth harmonic frequency generation in a CLBO crystal (206 nm, sum frequency of a fourth harmonic frequency and a fundamental one) [Turcicova 2019].…”
Section: High Average Power Amplifiersmentioning
confidence: 99%
“…It is already shown up to 100W at the 3 rd harmonic [18]. Also, there are new observations on DUV radiation at the 4 th and the 5 th laser harmonic generation [19][20][21][22][23], even reaching the record-high 2.5 W average output power generation at 206 nm [24]. Research groups are also studying efficient and compact laser light generation methods below 200 nm [17,25,26].…”
Section: Introductionmentioning
confidence: 97%