New polyphenols of the fluorene family and positive-tone photoresists based on them for 22-nm nanolithography

Bromine-containing polyetherimides with pendant adamantane and fluorene moieties: Synthesis and chemical transformations

“…Methoxyphenyl derivative VIII thus prepared was subjected to demethylation by procedure [13] to give PEI with pendant phenolic hydroxyl groups (polymer IX). At last, final polymer Х was synthesized by the nucleophilic substitution reaction of the phe nolic hydroxyl groups with pentafluorostyrene (XI) [4] (Syn Quest Co., United States).…”

“…The prepared PEIs and their derivatives were iden tified by IR spectroscopy and 1 Н, 13 С, and 19 F NMR. The IR spectrum of initial PEI (η red = 0.47 dL/g, 0.5% solution in NMP, 25°С) shows absorption bands typi cal for five membered imide rings at 1790, 1722, 1377, and 730 cm -1 .…”