New process for resist removal after lithography process using adhesive tape

Kubozono, Tatsuya; Moroishi, Yutaka; Ohta, Yoshio; Shimodan, Hideaki; Moriuchi, Noboru

doi:10.1117/12.241866

Cited by 5 publications

(1 citation statement)

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“…However, standard photolithography techniques are not suitable for the fabrication of PEDOT directly because of the incompatible photolithography developers and acid sensitive photoresists. To overcome the incompatibility between PEDOT and processing solvents, supercritical carbon dioxide and hydrofluoroether solvents, and corresponding photoresists are adopted, which is termed as orthogonal lithography. − Another way to overcome the incompatibility is to peel off the resist layer with a special adhesive tape, which is called as adhesion lithography. − Protection layer (i.e., parylene) on a PEDOT surface or specific lift off process to avoid the direct contact between PEDOT and developer can also be used to solve the chemical compatibility issues. , Although these solutions have been proposed, the complicated multiple steps are of high cost and time-consuming. Soft lithography, widely applied on organic electronics, is an efficient technique for the fabrication of CPs with large-area surfaces and sub-microscale resolution because there is no need of aggressive developing and etching processes .…”

Section: Introductionmentioning

confidence: 99%

Micropatterned PEDOT with Enhanced Electrochromism and Electrochemical Tunable Diffraction

Chen

Tan

et al. 2021

ACS Appl. Mater. Interfaces

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Micro–nanofabrication of conductive polymers (CPs) with functional structures is in great demand in organic electronic devices, micro-optics, and flex sensors. Here, we report the fabrication of micropatterned poly(3,4-ethylenedioxythiophene) (PEDOT) and its applications on flexible electrochromic devices and tunable diffractive optics. The localized electropolymerization of 3,4-ethylenedioxythiophene at the electrode/agarose gel stamping interface through an electrochemical wet stamping (E-WETS) technique is used to fabricate PEDOT with functional microstructures. PEDOT microdots, micro-rectangles, and interdigitated array microelectrodes are fabricated with submicron tolerance and ∼2 μm smallest feature size. Furthermore, the flexible PEDOT electrochromic devices consisting of the logo of Xiamen University are fabricated with a reversible switch of absorptivity. The improved optical and coloration–amperometric responses of electrochromism are demonstrated because of the enhanced charge transport rate of the micropatterned PEDOT. The electrochromism of the 2D PEDOT micropatterns is further used as a binary diffractive optical element to modulate the intensity and efficiency of diffracted 2D structural light because of the switchable absorptivity during doping and dedoping processes. When the potential is switched from 1 to −1 V to tune the absorptivity at ∼600 nm from low to high, the intensity of zero-order diffraction light spot decreases with the intensity of other order diffraction light spots increasing dramatically. The results demonstrate that E-WETS provides an alternative method for the fabrication of CPs with functional micro–nanostructures. The electrochemical tunable diffraction with high reversibility and fast response is of potential applications in micro-optics and flex sensors.

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