New selective two-step anodization of porous anodic alumina for thin-film encapsulation

Jeon, Gwang-Jae; Kim, Woo Young; Lee, Hee Chul

doi:10.1016/j.mee.2012.09.018

Cited by 6 publications

(1 citation statement)

References 22 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…moderate electrolyte temperature and anodizing voltage/current density). [2][3][4] This milestone discovery boosted intensive research activity in NAA technology, spreading the applicability of this unique nanomaterial across multiple disciplines such as nanofabrication 5, 6 , separation and filtration 7,8 , electromagnetism 9,10 , chemo-and biosensing 11,12 , photonics 13,14 and electronics 15, 16 . Since then, numerous studies explored various anodization strategies and conditions to tailorengineer the nanoporous structure of NAA for specific applications.…”

Section: Introductionmentioning

confidence: 99%

Realization of high-quality optical nanoporous gradient-index filters by optimal combination of anodization conditions

et al. 2020

View full text Add to dashboard Cite

show abstract

Section: Introductionmentioning

confidence: 99%

Realization of high-quality optical nanoporous gradient-index filters by optimal combination of anodization conditions

et al. 2020

View full text Add to dashboard Cite

show abstract

Integrated electrode and high density feedthrough system for chip-scale implantable devices

et al. 2013

View full text Add to dashboard Cite

Nanoporous Pirani sensor based on anodic aluminum oxide

Jeon

Kim

Shim

et al. 2016

Applied Physics Letters

View full text Add to dashboard Cite

A nanoporous Pirani sensor based on anodic aluminum oxide (AAO) is proposed, and the quantitative relationship between the performance of the sensor and the porosity of the AAO membrane is characterized with a theoretical model. The proposed Pirani sensor is composed of a metallic resistor on a suspended nanoporous membrane, which simultaneously serves as the sensing area and the supporting structure. The AAO membrane has numerous vertically-tufted nanopores, resulting in a lower measurable pressure limit due to both the increased effective sensing area and the decreased effective thermal loss through the supporting structure. Additionally, the suspended AAO membrane structure, with its outer periphery anchored to the substrate, known as a closed-type design, is demonstrated using nanopores of AAO as an etch hole without a bulk micromachining process used on the substrate. In a CMOS-compatible process, a 200 μm × 200 μm nanoporous Pirani sensor with porosity of 25% was capable of measuring the pressure from 0.1 mTorr to 760 Torr. With adjustment of the porosity of the AAO, the measurable range could be extended toward lower pressures of more than one decade compared to a non-porous membrane with an identical footprint.

show abstract

New selective two-step anodization of porous anodic alumina for thin-film encapsulation

Cited by 6 publications

References 22 publications

Realization of high-quality optical nanoporous gradient-index filters by optimal combination of anodization conditions

Realization of high-quality optical nanoporous gradient-index filters by optimal combination of anodization conditions

Integrated electrode and high density feedthrough system for chip-scale implantable devices

Nanoporous Pirani sensor based on anodic aluminum oxide

Contact Info

Product

Resources

About