The inhomogeneous parameters of Mo/4H-SiC Schottky barrier diodes were determined from current-voltage (I-V) characteristics in the temperature range of 303-498 K by using a general approach for the real Schottky diode. In this approach the total series resistances is divided into two resistances; the first one (R P ) is the sum of the series resistances (r) of the particular diodes connected in parallel and the second is the common resistance (R C ) to all particular diodes. The mean barrier height f ( ) and the standard deviation (σ) decrease linearly with decreasing temperature and they are between the values for the diodes with the two limiting cases; no current spreading and full current spreading. The series resistance R C increases, while the series resistance R P slightly decreases with decreasing temperature.