2000
DOI: 10.1016/s0924-4247(00)00310-1
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New tactile sensor chip with silicone rubber cover

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Cited by 100 publications
(56 citation statements)
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“…Some tactile sensors and small force sensors using microelectromechanical systems (MEMS) technology have been introduced. MEMS tactile sensing work has been focused mainly on silicon-based sensors that use piezoresistive [1][2][3] or capacitive sensing [4][5][6]. These sensors have been realized with bulk and surface micromachining methods.…”
Section: Introductionmentioning
confidence: 99%
“…Some tactile sensors and small force sensors using microelectromechanical systems (MEMS) technology have been introduced. MEMS tactile sensing work has been focused mainly on silicon-based sensors that use piezoresistive [1][2][3] or capacitive sensing [4][5][6]. These sensors have been realized with bulk and surface micromachining methods.…”
Section: Introductionmentioning
confidence: 99%
“…Many different approaches have been proposed to fabricate these sensors, most of them are based on piezoresistive (Engel et al 2006; Kane et al 2000;Mei et al 2000;Lomas et al 2004;Kim et al 2006;Wisitsoraat et al 2007; Shan et al 2005) or capacitive (Salo et al 2003;Leineweber et al 2000;Paschen et al 1998;Gray and Fearing 1996;Lee et al 2006; http://pressureprofile.com/products-robotouch) principles, and a few are based on optical (Hellard and Russell 2006) or piezoelectrical transduction (Dahiya et al 2007). Most of these sensors are made using technologies for Micro-ElectroMechanical Systems (MEMS) on silicon (Kane et al 2000;Lomas et al 2004; Salo et al 2003) or on polymers (Engel et al 2006;Kim et al 2006; Lee et al 2006).…”
Section: Introductionmentioning
confidence: 99%
“…In order to perform such local measurements, we take advantage of the recent development of Micro Electro Mechanical Systems (MEMS) sensors [37][38][39]. Local contact stress measurements are performed with a MEMS force sensor embedded at the rigid base of an elastomer film (Fig.…”
Section: Methodsmentioning
confidence: 99%