2001
DOI: 10.1016/s0924-4247(01)00754-3
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New thick-film material for piezoresistive sensors

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Cited by 19 publications
(8 citation statements)
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“…Related investigations have indicated that polarization fatigue of ferroelectric Pb(Zr x Ti 1−x )O 3 (PZT) thin film capacitors can be effectively suppressed upon using IrO 2 thin film electrodes [24,25]. Tankiewicz and co-workers have also studied IrO 2 as the conductive phase in thick-film resistors for a piezoresistive sensor to improve the operation temperature up to 175 • C [26].…”
Section: Introductionmentioning
confidence: 99%
“…Related investigations have indicated that polarization fatigue of ferroelectric Pb(Zr x Ti 1−x )O 3 (PZT) thin film capacitors can be effectively suppressed upon using IrO 2 thin film electrodes [24,25]. Tankiewicz and co-workers have also studied IrO 2 as the conductive phase in thick-film resistors for a piezoresistive sensor to improve the operation temperature up to 175 • C [26].…”
Section: Introductionmentioning
confidence: 99%
“…At first, only the basic piezoresistive characteristics of thick resistive films were examined. Later on, new resistive sensing elements emerged based on novel thick-film inks designed for each specific application [14,15]. On the other hand, standard thick-film resistors are being continuously used in contemporary electronic equipment that requires high functional capability, improved reliability and environmental stability.…”
Section: Mechanically Strained Thick-film Resistive Structuresmentioning
confidence: 99%
“…149 Very low processing temperatures may be reached by glasses largely based on PbO-TeO 2 , 45 PbO-V 2 O 5 145,147,148 and especially SnO-SnF 2 -PbO-PbF 2 -P 2 O 5 . 153 Glass frits are often used in conjunction with other materials that act as fillers (Table 4): insulating powders for dielectrics/overglazes/encapsulation/ sealing glasses, 18,67,145,147,[149][150][151][152]154 conductive oxides for resistors, 61,62,[155][156][157] metal powders and adhesion promoters for conductors, 63,64,88,[158][159][160] pigments, etc. Even for applications such as sealing, encapsulation or TF overglazes, where they are not intrinsically required, fillers are often found necessary or advantageous in practice, mainly to adjust the coefficient of thermal expansion (CTE) of the deposited material to that of the substrate(s) (see Donald's review 20 for an extensive list of filler CTEs).…”
Section: Main Performance Criteriamentioning
confidence: 99%