2017
DOI: 10.1515/mms-2017-0010
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New type of Piezoresistive Pressure Sensors for Environments with Rapidly Changing Temperature

Abstract: The theoretical aspects of a new type of piezo-resistive pressure sensors for environments with rapidly changing temperatures are presented. The idea is that the sensor has two identical diaphragms which have different coefficients of linear thermal expansion. Therefore, when measuring pressure in environments with variable temperature, the diaphragms will have different deflection. This difference can be used to make appropriate correction of the sensor output signal and, thus, to increase accuracy of measure… Show more

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Cited by 7 publications
(5 citation statements)
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“…They did not give any result by considering other parameters of diaphragm like resistivity, thickness of diaphragm etc. Budi Setiyono, Sumardi, Rafdito Harisuryo, "Measurement System of Temperature, Humidity and Air Pressure over 433 MHz Radio Frequency" [6] described that with an increase in temperature there is a drop in pressure value and vice a versa. As this geographical constraint impact value of pressure, to keep away from this impact they call for some gadget which should be able to take care of all this statistics efficiently.…”
Section: Terps (Trenched Etched Resonant Pressure Sensor)mentioning
confidence: 99%
“…They did not give any result by considering other parameters of diaphragm like resistivity, thickness of diaphragm etc. Budi Setiyono, Sumardi, Rafdito Harisuryo, "Measurement System of Temperature, Humidity and Air Pressure over 433 MHz Radio Frequency" [6] described that with an increase in temperature there is a drop in pressure value and vice a versa. As this geographical constraint impact value of pressure, to keep away from this impact they call for some gadget which should be able to take care of all this statistics efficiently.…”
Section: Terps (Trenched Etched Resonant Pressure Sensor)mentioning
confidence: 99%
“…Analysis of existing literary sources makes it possible to assert that there are two basic methods for measuring vibration parameters: contact methods with a constraint between the sensor and the object under study and non-contact ones, i. e., that are not connected with the object by a constraint [4][5][6][7].…”
Section: Literature Review and Problem Statementmentioning
confidence: 99%
“…Contact methods are the simplest methods for measuring vibration using piezoelectric sensors [4]. Such methods make it possible to measure with a high accuracy in the range of low frequencies and relatively large amplitudes of vibration but due to their high inertia, signal waveform is distorted which makes unfeasible measurement of high-frequency, small-amplitude vibrations.…”
Section: Literature Review and Problem Statementmentioning
confidence: 99%
“…The main parameters of the state-of-art earth pressure sensors are collected in Table 1. What is more, Tykhan et al [9] proposed a new type of piezoresistive pressure sensors for environments with rapidly changing temperature. Bouřa et al [10] proposed a wirelessly-powered high-temperature strain measuring probe based on piezoresistive nanocrystalline diamond layers, but the effect of applying an earth pressure box to test the pressure distribution proved unsatisfactory.…”
Section: Introductionmentioning
confidence: 99%