1998
DOI: 10.1117/12.312402
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New water-processable chemically amplified resists: three steps, two tones, one solvent

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“…To circumvent the sensitivity issue, our group in collaboration with professor J. M. J. Fréchet's group at University of California at Berkley exploited the concept of a chemical amplification to develop a variety of sensitive negative tone systems using cross-linking mechanisms . Alternatively, switching mechanisms featuring polarity change were developed on the basis of ring-closure reactions of maleic acid or the pinacol rearrangement …”
Section: Introductionmentioning
confidence: 99%
“…To circumvent the sensitivity issue, our group in collaboration with professor J. M. J. Fréchet's group at University of California at Berkley exploited the concept of a chemical amplification to develop a variety of sensitive negative tone systems using cross-linking mechanisms . Alternatively, switching mechanisms featuring polarity change were developed on the basis of ring-closure reactions of maleic acid or the pinacol rearrangement …”
Section: Introductionmentioning
confidence: 99%