Nichrome micro-heaters as actuators for microfluidic sensors

Gęca, Mateusz; Lizak, Tomasz; Kociubiński, Andrzej; Borecki, M.; Korwin-Pawlowski, Michael L.

doi:10.1117/12.2249184

Cited by 3 publications

(1 citation statement)

References 6 publications

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“…There are some kinds of products using the planar heating elements called by thin film heater or micro heater, but few studies or products for the heating chuck in semiconductor equipment. [10][11][12][13][14][15] In this study, we propose a wafer chuck planar heating element for plasma enhanced chemical vapor deposition (PECVD). We optimize the design of planar heating chuck (PHC) with an Analysis System (Thermal-Electric module in ANSYS) numerical analysis.…”

Section: Introductionmentioning

confidence: 99%

Planar heating chuck to improve temperature uniformity of plasma processing equipment

Min

Hong

2020

Jpn. J. Appl. Phys.

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Semiconductor fabrication has increasingly demanded improved control of process parameters related to equipment temperature, such as heating and cooling speed and temperature uniformity of the wafer chuck. We perform preliminary thermal-electrical analysis of a heating chuck with a planar heating element, to investigate the feasibility of a planar heating element for plasma-assisted deposition equipment. We propose and optimize circular electrode patterns for the planar heating element of a 6 inch heating chuck design to improve temperature uniformity of the wafer chuck. Using an Analysis System numerical study, we achieve a superior temperature uniformity profile compared to conventional coil-type heating elements.

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Section: Introductionmentioning

confidence: 99%

Planar heating chuck to improve temperature uniformity of plasma processing equipment

Min

Hong

2020

Jpn. J. Appl. Phys.

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Fully Integrated and Foldable Microdevice Encapsulated with Agarose for Long-Term Storage Potential for Point-of-Care Testing of Multiplex Foodborne Pathogens

Trinh

Lee

2019

ACS Sens.

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In this study, we fabricated a fully integrated and foldable microdevice encapsulated with 2-hydroxyethyl agarose for long-term storage of reagents for the integration of isothermal amplification and subsequent colorimetric detection for the monitoring of multiplex foodborne pathogens. The microdevice comprises a reaction zone and a detection zone. Both zones were made of a thin polycarbonate film and sealed by an adhesive film to make the microdevice foldable. The 2-hydroxyethyl agarose with loop-mediated isothermal amplification (LAMP) reagents and silver nitrate were deposited in the reaction and detection chambers, respectively, for long-term maintenance of reagent activity. A thin graphene-based heater associated with a handheld battery was employed to supply a constant temperature for on-chip amplification for 30 min. To simplify the sample manipulation process, a folding motion was adopted to allow the loading of LAMP amplicons from the reaction to the detection chambers and a colorimetric strategy was used for simple visual read-out of the results on-site. Using the agarose, the reagents were successfully stored and the reagent activity was maintained for at least 45 days. Prior to performing multiplex detections, the spiked juice was thermally lysed and purified with polydopamine-coated paper. The amplifications of Salmonella spp. and Escherichia coli O157:H7 (E. coli O157:H7) were successfully demonstrated based on the stable isothermal condition attained by the heater. The microdevice can detect the low concentration of E. coli O157:H7 at 2.5 × 10 2 copies per mL. The introduced microdevice acts as a simple and user-friendly platform for the identification of foodborne pathogens, paving the way for the construction of a truly portable, read-out microdevice for use as a public healthcare monitoring device.

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