Niobium clusters: mechanism of combinatorial synthesis of sprayed metal cluster Nb_nO_m-

Ion sputtering as methods for generation of cluster particles

“…The performed experiments indicate that ion sputtering is an effective method for generating heteronuclear oxide clusters Si n O m and Si n O m H k of various sizes. Qualitatively, the processes of formation of these heteronuclear clusters can be described in terms of modern concepts [8], and the main channels for their formation are determined in accordance with the mechanism of combinatorial synthesis [6,[9][10][11].…”