2007
DOI: 10.1111/j.1551-2916.2007.01577.x
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Nitridation of Silica Characterized by High‐Energy X‐Ray Diffraction Technique

Abstract: The structure of amorphous silicon oxynitride formed under nitridation conditions using ammonia gas, before the onset of silicon nitride crystallization, is determined employing high‐energy X‐ray diffraction (HEXRD) technique. The derived real‐space function suggests that smaller ring structures, especially 3R and 4R (R: ring), which are the dominant rings in crystalline silicon nitride, are not major species in amorphous silicon oxynitride, and form in the latter part of the silicon nitride crystallization.

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Cited by 8 publications
(9 citation statements)
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“…If ammonia serves as a nitridation agent, the oxygen atoms in the silica can be substituted by nitrogen atoms step by step at B1450 1C (SiO 2 + NH 3 -Si 3 N 4 + H 2 O + N 2 + H 2 ). 106,107 The partially nitridized intermediate contains silicon, oxygen and nitrogen, forming SiN x O y mixed covalently bonded network, so called as silicon oxynitride. [106][107][108][109] This process has been clearly tracked by 29 Si NMR spectra, as shown in Fig.…”
Section: Mesoporous Silicon Nitride and Oxynitride Materialsmentioning
confidence: 99%
See 2 more Smart Citations
“…If ammonia serves as a nitridation agent, the oxygen atoms in the silica can be substituted by nitrogen atoms step by step at B1450 1C (SiO 2 + NH 3 -Si 3 N 4 + H 2 O + N 2 + H 2 ). 106,107 The partially nitridized intermediate contains silicon, oxygen and nitrogen, forming SiN x O y mixed covalently bonded network, so called as silicon oxynitride. [106][107][108][109] This process has been clearly tracked by 29 Si NMR spectra, as shown in Fig.…”
Section: Mesoporous Silicon Nitride and Oxynitride Materialsmentioning
confidence: 99%
“…106,107 The partially nitridized intermediate contains silicon, oxygen and nitrogen, forming SiN x O y mixed covalently bonded network, so called as silicon oxynitride. [106][107][108][109] This process has been clearly tracked by 29 Si NMR spectra, as shown in Fig. 5.…”
Section: Mesoporous Silicon Nitride and Oxynitride Materialsmentioning
confidence: 99%
See 1 more Smart Citation
“…Oxide glasses have particular relevance in geoscience and technology and include soda-lime window glass, borosilicate pyrex glass, lead oxide glassware, aluminosilicate fiberglass, and aluminate glass fiber optics. Much of the research has focused on the short and intermediate range order in silicates [57][58][59][60][61][62][63][64][65], Na-silicates [66,67], germanates [68], borates [69][70][71] aluminates [72][73][74], and aluminosilicates [44,75,76]. XRD PDF data on oxide glasses is highly complimentary to neutron diffraction PDF data since neutrons are more sensitive to the oxygen atoms, often providing a stark contrast in the partial structure factor weighting factors.…”
Section: Experiments On Glasses and Liquidsmentioning
confidence: 99%
“…While XAS is considered as the most suitable technique for such investigations, the recent advances in the X-ray total scattering technique make it also well suited to study the structure of materials with limited structural coherence. In particular, using the pair distribution function (PDF) method, it is possible to extract the structure of amorphous materials [18][19][20] which is indeed how this technique was first developed. More recently the PDF method has been successfully applied to characterise materials of technological importance that display ordered and disordered components at varying length scales such as defect structures and locally disordered materials as well as nano-crystalline materials [21][22][23] Furthermore, this technique can provide structural information over much larger distances compared to XAS since this method does not suffer from 1/R 2 dependence of amplitude as well as effects from multiple-scattering which prevents a clear determination of the structure of disordered solids using the XAS technique.…”
Section: Introductionmentioning
confidence: 99%