“…Nitrogen concentration on the surface is a consequence of the balance between sputtering on the surface and nitrogen diffusion [19,20]. In contrast to nitriding processes with ammonia mixtures, in plasma assisted processes a fast evolution of nitrogen concentration takes place on the surface [21,22]. Nitrogen concentration on the surface, in plasma assisted processes, depends on molecular, neutral or ionized nitrogen, in different electronic, vibrational and rotational configurations.…”