The self-diffusion of iron and nitrogen is measured in nm range non-magnetic iron nitride thin films. Two non-magnetic iron nitrides, Fe 2.23 N and FeN, were studied using neutron reflectivity. Neutron reflectivity with a depth resolution in the sub-nm range has a different scattering cross section for isotopes, providing a unique opportunity to measure very small diffusivities. The isotope heterostructure in thin film multilayers [Fe-N/ 57 Fe-N] 10 and [Fe-N/Fe-15 N] 10 were prepared using magnetron sputtering. It was observed that nitrogen diffuses slower than iron although the atomic size of iron is larger than that of nitrogen. It was found that a significantly larger group of N atoms participates in the diffusion process than of Fe, making N diffusion slower than that of Fe. V