“…[12][13][14][15][16][17][18][19] N 2 -H 2 plasmas have also been applied to prepare III-V and nitride IV semiconductors and to the chemical synthesis of NH 3 . 10,17,[20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35] Similarly to other plasma processes, it is worthwhile investigating the chemical species in the gas phase of the plasma using various plasma diagnostic methods. Until now, the most frequently used plasma-diagnostics method for N 2 plasmas has been optical emission, which gives us information on excited molecules, radicals, atoms, and ions.…”