2009
DOI: 10.1088/0957-0233/21/1/012001
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Noise in MEMS

Abstract: This review provides a comprehensive recap of noise research in MEMS. Some background on noise and on MEMS is provided. We review noise production mechanisms, and highlight work on the theory and modeling of noise in MEMS. Then noise measurements in the specific types of MEMS are reviewed. Inertial MEMS (accelerometers and angular rate sensors), pressure and acoustic sensors, optical MEMS, RF MEMS, surface acoustic wave devices, flow sensors, and chemical and biological MEMS, as well as data storage devices an… Show more

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Cited by 129 publications
(72 citation statements)
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“…However, in optical MEMS, thermal noise is the dominant noise source [28,29]. However, in optical MEMS, thermal noise is the dominant noise source [28,29].…”
Section: Mechanical Design and Analysismentioning
confidence: 99%
“…However, in optical MEMS, thermal noise is the dominant noise source [28,29]. However, in optical MEMS, thermal noise is the dominant noise source [28,29].…”
Section: Mechanical Design and Analysismentioning
confidence: 99%
“…Given the latest advances in low noise microelectronics, Brownian motions of gas molecules impacting the proof mass are the major source of noise in high performance micromachined inertial sensors. Power spectral density pg of the resulting broadband Gaussian noise is computed as [29,30] PB = (1) where KB is the Boltzmann constant, T^ is the Kelvin temperature, a>o is the natural frequency, m is the mass of the sensing element, and Q is the quality factor. A significant noise reduction is therefore possible by using a relatively large proof mass, m, in a vacuum microchamber (high Q).…”
Section: Sensor Noisementioning
confidence: 99%
“…In the frequency domain this transfer function represents a filter (3) whose gain, K(f), is inversely proportional to the frequency squared. An important consequence of this property is a strong sensitivity to low frequency disturbances, such as the "l/f noise in MST devices [30,35]. To illustrate implications of this feature we investigate a state-of-the-art, commercial accelerometer [36] mounted on a vibration isolation platform.…”
Section: Sensor Noisementioning
confidence: 99%
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“…The impact of the sensor electrical noise on its performance is evaluated as well as the stability of the sensor with respect to variations in temperature and bending of the flexible substrate. The electrical noise characterization [12] measured the 1/f-noise and Johnson noise enabling the noise equivalent pressure (NEPr) to be calculated using the sensor measured sensitivity data. The thermal-mechanical noise level [13], [14] was also calculated.…”
Section: Introductionmentioning
confidence: 99%