Noise in sensors

Bordoni, F.; D’Amico, A.

doi:10.1016/0924-4247(90)85003-m

Cited by 28 publications

(12 citation statements)

References 21 publications

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“…Noise induced by temperature fluctuations is another example of how the fluctuation-dissipation theorem can be applied to any linear dissipative system in thermodynamic equilibrium. According to derivations outlined in [16], [17], the expression for the power spectral density of temperature fluctuations is:…”

Section: Temperature Fluctuations-induced Noisementioning

confidence: 99%

Joint Effect of Heterogeneous Intrinsic Noise Sources on Instability of MEMS Resonators

Jakšić¹,

Jokić²,

Frantlović³

et al. 2016

ELS

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This article's focus is on the numerical estimation of the overall instability of microelectromechanical-system-based (MEMS) resonators, caused by intrinsic noise mechanisms that are different in nature (electrical, mechanical or chemical). Heterogeneous intrinsic noise sources in MEMS resonators that have been addressed here are Johnson–Nyquist noise, 1/f noise, noise caused by temperature fluctuations and adsorptiondesorption induced noise. Their models are given first (based on analytical modeling or based on empirical expressions with experimentally obtained parameters). Then it is shown how each one contributes to the phase noise, a unique figure of merit of resonators instability. Material dependent constants  and knee position in noise spectrum, needed for empirical formulae referring to 1/f noise, have been obtained experimentally, by measurements of noise of MEMS components produced in the Centre of Microelectronic Technologies of the Institute of Chemistry, Technology and Metallurgy in Belgrade. According to these measurements,  varies in the range from 0.776.10-4 to 2.26.10-4 and cut off frequency for 1/f noise varies from 147 Hz to 1 kHz. The determined values are then used for the modeling of micro-resonator phase noise with electrical origin and overall phase noise of a micro-resonator. Numerical example for calculation of overall phase noise is given for a micro-cantilever, produced by the same technology as measured components. The outlined noise analysis can be easily extended and applied to noise analysis of MEMS resonator of an arbitrary shape.

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Section: Temperature Fluctuations-induced Noisementioning

confidence: 99%

Joint Effect of Heterogeneous Intrinsic Noise Sources on Instability of MEMS Resonators

Jakšić¹,

Jokić²,

Frantlović³

et al. 2016

ELS

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“…Generally, mechanical sensors suffer from various noise sources such as thermal, Hooge, shot, photon or thermomechanical [ 23 ]. In the case of piezoresistive sensors, the thermal and the Hooge noise sources are found to have high effect on the performance.…”

Section: Sensor Noise and Resolutionmentioning

confidence: 99%

“…Johnson noise [ 23 ] is fundamental noise in nature for any resistor. This noise is a “white noise” with a spectral density that is independent of frequency, and is considered as the basic performance limit, set by the thermal energy of the carriers in a resistor [ 24 ].…”

Section: Sensor Noise and Resolutionmentioning

confidence: 99%

“…For example, Kanda's curve underpredicted the experimentally observed π l at higher concentrations. It has been suggested [ 22 ] to use the maximum theoretical value predicted by Kanda, which showed to be accurate at lower doping concentrations [ 23 ], and adjust it using Harley's piezoresistance factor for higher concentrations. Unfortunately, this is only possible at room temperature, and for different temperatures Kanda's piezoresistance factor is the only way to scale the piezoresistive coefficients.…”

Section: Introductionmentioning

confidence: 99%

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High Sensitivity MEMS Strain Sensor: Design and Simulation

Mohammed

Moussa

Lou

2008

Sensors

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In this article, we report on the new design of a miniaturized strain microsensor. The proposed sensor utilizes the piezoresistive properties of doped single crystal silicon. Employing the Micro Electro Mechanical Systems (MEMS) technology, high sensor sensitivities and resolutions have been achieved. The current sensor design employs different levels of signal amplifications. These amplifications include geometric, material and electronic levels. The sensor and the electronic circuits can be integrated on a single chip, and packaged as a small functional unit. The sensor converts input strain to resistance change, which can be transformed to bridge imbalance voltage. An analog output that demonstrates high sensitivity (0.03mV/με), high absolute resolution (1με) and low power consumption (100μA) with a maximum range of ±4000με has been reported. These performance characteristics have been achieved with high signal stability over a wide temperature range (±50°C), which introduces the proposed MEMS strain sensor as a strong candidate for wireless strain sensing applications under harsh environmental conditions. Moreover, this sensor has been designed, verified and can be easily modified to measure other values such as force, torque…etc. In this work, the sensor design is achieved using Finite Element Method (FEM) with the application of the piezoresistivity theory. This design process and the microfabrication process flow to prototype the design have been presented.

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“…There is Johnson noise associated with the transfer of heat between the device and its surroundings that can be written as [37]: Hz (4) which is inversely related to the dither frequency. For a 300 m 40 m 10 m Si shank, , the thermal capacitance of the device, is 2.2 10 J/K.…”

Section: Hzmentioning

confidence: 99%

A silicon micromachined scanning thermal profiler with integrated elements for sensing and actuation

Gianchandani

Najafi

1997

IEEE Trans. Electron Devices

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The thermal profiler is a scanning probe microscope with a miniature thermocouple (TC) at its tip which provides topographic and thermographic information by sensing heat conducted across a small air gap. The silicon micromachined thermal profilers (SMTP's) described in this paper are structurally comprised of a probe that can be longitudinally actuated by an integrated electrostatically driven suspension. A polysilicongold TC is located near the probe tip, which overhangs a glass substrate; a resistive heater is integrated with the base. An ICcompatible, 8-mask fabrication process has been developed and SMTP's with various types of frames and probes have been designed, fabricated, and thermally characterized. The maximum thermoelectric signal available from a 7-TC thermopile probe has been measured at 824 mV/W of input power to the heater, whereas from a simpler design it was 48 mV/W. Simple dithered and nondithered scans are presented to demonstrate the basic functionality of fabricated devices. The noise due to our test setup has been measured at 20 mK. For a 1 m 2 0.5 m tip and a 0.1 m long air gap the spatial resolution and the device NETD have been theoretically estimated as 3.33 nm and 0.1 mK/ p Hz, respectively.

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Noise in sensors

Cited by 28 publications

References 21 publications

Joint Effect of Heterogeneous Intrinsic Noise Sources on Instability of MEMS Resonators

Joint Effect of Heterogeneous Intrinsic Noise Sources on Instability of MEMS Resonators

High Sensitivity MEMS Strain Sensor: Design and Simulation

A silicon micromachined scanning thermal profiler with integrated elements for sensing and actuation

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