We demonstrate high-speed charge detection at room temperature with single-electron resolution by using a radio-frequency field-effect transistor (RF-FET). The RF-FET combines a nanometerscale silicon FET with an impedance-matching circuit composed of an inductor and capacitor. Driving the RF-FET with a carrier signal at its resonance frequency, small signals at the transistor's gate modulate the impedance of the resonant circuit, which is monitored at high speed using the reflected signal. The RF-FET driven by high-power carrier signals enables a charge sensitivity of 2 Â 10 À4 e/Hz 0.5 at a readout bandwidth of 20 MHz. V C 2013 AIP Publishing LLC.[http://dx.doi.org/10.1063/1.4822430]Charge sensors based on a nanometer-sale transistor have been widely studied to detect extremely small signals, 1 such as image charges from DNA, 2 single-electron chargecoupled devices, 3 and mechanical motion. 4 One of the major breakthroughs in charge sensors was the development of the radio-frequency single-electron transistor (RF-SET). By using an impedance matching circuit, the RF-SET achieved both extremely high charge sensitivity and a wide bandwidth (1.2 Â 10 À5 e/Hz 0.5 at 1.1 MHz). 5 Because of this unique combination, the RF-SET also has stimulated fundamental research on single-electron transport via a quantum dot for quantum information processing. 6-8 The RF-SET offers three advantages for charge detection: (i) a single-electron transistor with high charge sensitivity due to Coulombblockade transport via a tiny island, 1 (ii) a reflectometry technique by connecting the SET to an impedance matching circuit composed of an inductor expands the readout bandwidth, and (iii) substantial reduction of low-frequency flicker noise due to the high operating frequency. However, in practice, the RF-SET is limited to use in only cryogenic sensing applications due to its reliance on Coulomb blockade. Silicon SETs with large charging energy can increase the working operating temperature; however, it is still in practice limited to less than 13 K. 9 The idea of the RF-SET has in recent years also been extended to charge sensors based on quantum point contacts (QPCs) in the form of the RF-QPC: 10 however, like the RF-SET, the RF-QPC also requires cryogenic temperatures.Silicon field-effect transistors (FETs) with nanometerscale channels represent a unique room-temperature charge detector that also achieves charge sensitivity with single-electron resolution. 11 The small channel allows current characteristics to be modulated sensitively by a single electron 11 and has the smaller Flicker noise in comparison with wide channels, 12 leading to a charge sensitivity of 1.3 Â 10 À3 e/Hz 0.5 even at room temperature. Such features of the silicon nanometerscale FET expand the range of detectable charge signals and have been recently used to sense infrared radiation, 13 molecules, 14 and mechanical motion. 15 However, the operation speed of the dc FET is slow ($2 kHz) due to the large channel resistance R C combined with the large stray capacit...