Non-contact atomic force microscope with a PZT cantilever used for deflection sensing, direct oscillation and feedback actuation

Miyahara, Yoichi; Deschler, M.; Fujii, Tôru; Watanabe, Shunji; Bleuler, Hannes

doi:10.1016/s0169-4332(01)00929-1

Cited by 36 publications

(21 citation statements)

References 17 publications

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“…Cantilever-based MEMS/NEMS structures such as microcantilever sensors [1,2], microaccelerometers [3], atomic force microscopes (AFM) [4][5][6], microswitches [7,8] etc are widely used. Since their discovery, carbon nanotubes have generated various application ideas due to their remarkable properties.…”

Section: Introductionmentioning

confidence: 99%

Pull-in instability study of carbon nanotube tweezers under the influence of van der Waals forces

Wang

Zhang

Zhao

et al. 2004

J. Micromech. Microeng.

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The pull-in instability of two nanotubes under van der Waals force is studied. The cantilever beam with large deformation model is used. The influence of nanotube parameters such as the interior radius, the gap distance between the two nanotubes, etc, on the pull-in instability is studied. The critical nanotube length is determined for each specific set of nanotube parameters. The Galerkin method is applied to discretize the governing equations, and it shows good convergence.

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Section: Introductionmentioning

confidence: 99%

Pull-in instability study of carbon nanotube tweezers under the influence of van der Waals forces

Wang

Zhang

Zhao

et al. 2004

J. Micromech. Microeng.

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“…The resonance frequency was approximately 100 kHz, and the quality factor was more than 500. The effective spring constant was 150 N/m [19]. Figure 1 shows a scanning electron microscopy (SEM) image of a horizontal side view of the PZT cantilever.…”

Section: Pzt Cantilevermentioning

confidence: 99%

“…First, to use the PZT cantilever as a micro-actuator [19], we discuss the converse piezoelectric property. Second, the performance of the actuator is evaluated by the indentation produced on the polyvinyl alcohol (PVA) film.…”

Section: Introductionmentioning

confidence: 99%

Using dynamic force microscopy with piezoelectric cantilever for indentation and high-speed observation

Satoh

Nakahara

Kobayashi

et al. 2017

NOLTA

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Abstract:We investigate the indentation process of lead zirconate titanate (PZT) cantilever on a nanoscale level and attempt a high-speed observation of the process using dynamic force microscopy (DFM), taking advantage of the converse piezoelectric property of the cantilever. We confirm that the PZT cantilever has a good converse piezoelectric effect, works as an excellent actuator, and can produce an indentation on the polymer film, making it suitable for nanoscale applications. Moreover, for use as an actuator instead of a displacement sensor, the PZT cantilever was incorporated into the feedback control system in dynamic force microscopy (DFM), and could successfully be operated. We attempted a high-speed observation using DFM, and we successfully acquired the topographic image on a 1 × 1 µm scan area within 8.5 seconds.

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“…In recent years a considerable effort has been accomplished in the development of technological application based on these phenomena. The piezoelectric devices, include, among others: cantilever actuators, [1], [2], probes for atomic force microscopy [3], ultrasonic micromotors [4], [5], [6], micropumps [7], ultrasonic transducers [8], [9] and actuators for suppression of mechanical vibrations in buildinglike structures [10].…”

Section: Introductionmentioning

confidence: 99%

Monte Carlo Simulation of Ferroelectric Behavior in PZT Films by Using a Stress Dependent DIFFOUR Hamiltonian

Álvarez

Bedoya-Hincapié

2014

ing.cienc.

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In this work the polarization and hysteresis response of Lead Zirconate Titanate (PZT) ferroelectric thin films was studied in relation to the variation on temperature, stress, electric field and the content of non-ferroelectric impurities by using a Monte Carlo simulation. The simulation was based on a DIFFOUR Hamiltonian that takes into account the effect of uniaxial stress, in addition to the nearest neighbor dipoles interaction and the effect of an external electric field. The obtained results for hysteresis loops and polarization curves correspond with reported experimental data for this material.Key words: Monte Carlo; simulation; ferroelectrics; DIFFOUR; PZT. 65|Monte Carlo Simulation of Ferroelectric Behavior in PZT films by using a stress dependent DIFFOUR Hamiltonian Simulación Monte Carlo del comportamiento ferroeléctrico de películas de PZT empleando un Hamiltoniano DIFFOUR dependiente de la presión ResumenEn este trabajo se estudió la respuesta de polarización y de histéresis en películas delgadas de titanato zirconato de plomo (PZT) a la variación de temperatura, presión, campo eléctrico y contenido de impurezas no ferroeléctricas, mediante simulación Monte Carlo. La simulación se basó en un Hamiltoniano DIFFOUR, que tiene en cuenta el efecto de un esfuerzo uniaxial, además de la interacción entre dipolos vecinos y el efecto de un campo eléctrico externo. Los resultados obtenidos para ciclos de histéresis y curvas de polarización se ajustan a los datos experimentales reportados para este material.

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Non-contact atomic force microscope with a PZT cantilever used for deflection sensing, direct oscillation and feedback actuation

Cited by 36 publications

References 17 publications

Pull-in instability study of carbon nanotube tweezers under the influence of van der Waals forces

Pull-in instability study of carbon nanotube tweezers under the influence of van der Waals forces

Using dynamic force microscopy with piezoelectric cantilever for indentation and high-speed observation

Monte Carlo Simulation of Ferroelectric Behavior in PZT Films by Using a Stress Dependent DIFFOUR Hamiltonian

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