Non-contact handling and transportation for substrates and microassembly using ultrasound-air-film-technology

Reinhart, Gunther; Heinz, Michael; Stock, Johannes; Zimmermann, Josef; Schilp, Michael; Zitzmann, Adolf; Hellwig, Jens

doi:10.1109/asmc.2011.5898208

Cited by 10 publications

(9 citation statements)

References 7 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Implemented industrial applications cover a large range of sizes from end effectors for wafer and parts pick-and-place to the handling of large and thin substrates such as flat panel displays, photovoltaic cells, etc. [8,10,37,38] (see for example ZS-Handling products 3 ). In addition to levitation, a planar object can be transported by a flexural traveling wave [11,39].…”

Section: Ultrasound Bearing Surfacesmentioning

confidence: 99%

“…For example, end effectors such as semiconductor wafer handlers have side stops to prevent the substrate from sliding off the gripper [9]. Micro-grippers and top-side handling systems use vacuum nozzles for self-centering and producing attraction forces [10].…”

Section: Ultrasound Bearing Surfacesmentioning

confidence: 99%

“…Not only did they fabricate micro air-jet valves, but also proposed the concept of distributed manipulation using micro actuator arrays. Since then, many other types of contactless pneumatic manipulation systems are introduced such as air bearing using ultrasound [8][9][10][11], manipulation using passive air flow [12][13][14][15], manipulation using induced air flow [16][17][18][19], manipulation using tilted air-jet array [20][21][22][23][24][25].…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

Laurent

Moon

2015

Intel Serv Robotics

View full text Add to dashboard Cite

Many manipulation systems using air flow have been proposed for object handling in a non-prehensile way and without solid-to-solid contact. Potential applications include high-speed transport of fragile and clean products and high-resolution positioning of thin delicate objects. This paper discusses a comprehensive survey of state-of-the-art pneumatic manipulation from the macro scale to the micro scale. The working principles and actuation methods of previously developed air-bearing surfaces, ultra-sonic bearing surfaces, air-flow manipulators, air-film manipulators, and tilted air-jet manipulators are reviewed with a particular emphasis on the modeling and the control issues. The performance of the previously developed devices are compared quantitatively and open problems in pneumatic manipulation are discussed.

show abstract

Section: Ultrasound Bearing Surfacesmentioning

confidence: 99%

Section: Ultrasound Bearing Surfacesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

Laurent

Moon

2015

Intel Serv Robotics

View full text Add to dashboard Cite

show abstract

“…8 Also, fluid dynamics have been studied by acoustic levitation, [10][11][12][13][14] which can measure the liquid surface tension, observe the steadystate acoustic streaming flow patterns, 11 and carry out mass transfer in the surface of sphere by acoustic streaming. 12 Acoustic levitation has been used in assembly as well, [15][16][17] even small living animals could be levitated by acoustic method. 18 However, most of the previous research were working with fixed levitation platform, at which the objects movement is difficult to be controlled.…”

Section: Introductionmentioning

confidence: 99%

Ultrasonic robotic system for noncontact small object manipulation based on Kinect gesture control

Yang

Shen

Lui

et al. 2017

International Journal of Advanced Robotic Systems

View full text Add to dashboard Cite

Acoustic levitation system, with the advantages of avoiding clamping force on samples, has been widely introduced into noncontact manipulation. Previous acoustic levitation systems were generally fixed and could not realize remote adjustment of manipulation stage. In this article, we develop an ultrasonic robotic system for small object manipulation which is capable of noncontact operation, remote control, and gesture-based intelligent control. The whole setup is composed of acoustic levitation platform, mobile operation platform, and Kinect sensing system which provides a humanized approach for human-machine interaction. The experimental results validate a sufficient suite of innovations for achieving remote control of this acoustic levitation system based on gesture recognition method. It will not only pave a new way for noncontact manipulation system but also greatly reduce the difficulty and cost of operation.

show abstract

“…For instance, air bearings are widely used to transport large, thin and heavy products like glass and LCD panels [5]. Instead of pressurized air fed through orifice or porous media, ultrasound bearings can also be used to lift a substrate over a vibrating plate [6], [7], [8], [9]. But air bearing and vibrating tables realize only the levitation of product, the motion is still achieved by another principle (gravity, wheels, belt conveyors).…”

Section: Introductionmentioning

confidence: 99%

Design, modeling and control of a modular contactless wafer handling system

Dahroug

Laurent

Guelpa

et al. 2015

2015 IEEE International Conference on Robotics and Automation (ICRA)

View full text Add to dashboard Cite

In the photovoltaic solar cell industry as in the semiconductor industry, efforts to reduce the thickness of silicon wafers are in progress. Wafer damage and breakage during handling can lead to unacceptable yields and alternative solutions have to be proposed. This paper presents a modular contact-free wafer handling system that responds to the industrial requirements in terms of throughput and flexibility. The system is based on simple unidirectional modules that can be assembled together to form the desired trajectory. A complete and accurate physical model of the modular system describing the motion of the wafer transported by directed airjets is proposed. A decentralized control at the block level is realized to damp the object motion. The experimental results show a great reduction of the response time compared to free motion and a standard deviation of the servo error below the millimeter. In addition, simulations show that a 150 mm wafer could reach a speed up to 2.9 m/s on large conveyors.

show abstract

Non-contact handling and transportation for substrates and microassembly using ultrasound-air-film-technology

Cited by 10 publications

References 7 publications

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

A survey of non-prehensile pneumatic manipulation surfaces: principles, models and control

Ultrasonic robotic system for noncontact small object manipulation based on Kinect gesture control

Design, modeling and control of a modular contactless wafer handling system

Contact Info

Product

Resources

About