1990
DOI: 10.1016/0921-5107(90)90039-e
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Non-contacting determination of carrier lifetime and surface recombination velocity using photothermal radiometry

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Cited by 29 publications
(24 citation statements)
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“…The fits were sensitive to the value of s 1 which determined the slope of the amplitude decay, whereas the value of s 2 was relatively unimportant, as long as it was much larger than s 1 , in agreement with earlier findings by Sheard et al using PTR signals. 4 Physically, this is as expected, since the back surface of the wafers was not polished and therefore presented a large specific area for recombination. The PC signal fittings were most sensitive to the recombination lifetime values, which decreased with increasing applied dc voltage.…”
Section: A Bulk Si Photoconductorssupporting
confidence: 62%
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“…The fits were sensitive to the value of s 1 which determined the slope of the amplitude decay, whereas the value of s 2 was relatively unimportant, as long as it was much larger than s 1 , in agreement with earlier findings by Sheard et al using PTR signals. 4 Physically, this is as expected, since the back surface of the wafers was not polished and therefore presented a large specific area for recombination. The PC signal fittings were most sensitive to the recombination lifetime values, which decreased with increasing applied dc voltage.…”
Section: A Bulk Si Photoconductorssupporting
confidence: 62%
“…21 The best-fitted and D values are well within the accepted norms of recombination lifetimes in Si. 4,22 Figure 5 shows the PC signal ͑amplitude and phase͒ vs applied voltage V dc data at two modulation frequencies. The electric-field E values utilized in the PC and the PTR signal fits were EϭV dc /2ϫ10 Ϫ3 V/m, reflecting the lateral dimensions of the sample.…”
Section: A Bulk Si Photoconductorsmentioning
confidence: 99%
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“…The experimental setup for the photothermal radiometry (PTR) method [6,7] used to measure the frequency dependencies ofthe SPD magnitude and phase is shown in Fig.4. A harmonically modulated Iaser beam obtained by modulating an Ar+ Iaser using an acousto-optic modulator (AOM) was slightly focused The curves are normalized to those obtained for non-implanted Si.…”
Section: Experimental Results Für Ion-implanted Simentioning
confidence: 99%
“…The thermal and plasma waves are the result of the illumination of the sample by the intensity mod− ulated beam of light. The theory and experiment of the PTR method was described in papers [10][11][12][13][14][15][16][17][18][19][20]. The PTR method was used to obtain information about carrier transport parameters such as carrier recombination lifetimes, surface recombination velocities and carrier diffusion coefficients.…”
Section: Introductionmentioning
confidence: 99%