2022
DOI: 10.1007/s12633-022-02231-3
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Non-Destructive Evaluation of Toxic-Less Approach on Emitter Formation by Water-based Phosphoric Acid for n-Type Silicon

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“…Additionally, the thermal doping process uses dopant sources such as POCl 3 and BBr 3 , which are not environmentally friendly because of their toxic and corrosive properties. [ 10 ]…”
Section: Introductionmentioning
confidence: 99%
“…Additionally, the thermal doping process uses dopant sources such as POCl 3 and BBr 3 , which are not environmentally friendly because of their toxic and corrosive properties. [ 10 ]…”
Section: Introductionmentioning
confidence: 99%